A PMUT-based Ultrasonic Probe Used for Contact Force Sensing

Tingzhong Xu, Libo Zhao, Zixuan Li, Jiawei Yuan, Yihe Zhao, Guoxi Luo, Jie Li, Zhiakang Li, Ping Yang, Zhuangde Jiang

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Abstract

This work conducts systematic research on the design, optimization and application of piezoelectric micromachined ultrasonic transducers (PMUT) based ultrasonic probe. And it is the first time for PMUT used in contact force sensing. The PMUT chip consists of a pair of concentrically aligned circular and annular arrays used for receiving and emitting ultrasound, respectively. It achieves an emitting sensitivity of 1200 Pa/V. And the analytical model results achieve a good agreement with the experimental results, which only have relative errors of 8.8% and 6.3% in central working frequency and fractional bandwidth, respectively. Finally, an application experiment is carried out for contact force sensing, which achieves a maximum measuring sensitivity of -111 N/dB.
Original languageEnglish
Title of host publication2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages419-422
Number of pages4
DOIs
Publication statusPublished - 29 Jan 2021
Externally publishedYes
Event2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA
Duration: 25 Jan 202129 Jan 2021

Conference

Conference2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Period25/01/2129/01/21

Keywords

  • Systematics
  • Sensitivity
  • Ultrasonic variables measurement
  • Force
  • Acoustics
  • Sensors
  • Probes

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