TY - JOUR
T1 - A novel interferometric characterization technique for 3D analyses at high pressures and temperatures
AU - Roshanghias, Ali
AU - Bardong, Jochen
AU - Pulko, Jozef
AU - Binder, Alfred
PY - 2018/3/28
Y1 - 2018/3/28
N2 - Advanced optical measurement techniques are always of interest for the characterization of engineered surfaces. When pressure or temperature modules are also incorporated, these techniques will turn into robust and versatile methodologies for various applications such as performance monitoring of devices in service conditions. However, some microelectromechanical systems (MEMS) and MOEMS devices require performance monitoring at their final stage, i.e. enclosed or packaged. That necessitates measurements through a protective liquid, plastic, or glass, whereas the conventional objective lenses are not designed for such media. Correspondingly, in the current study, the development and tailoring of a 3D interferometer as a means for measuring the topography of reflective surfaces under transmissive media is sought. For topography measurements through glass, water and oil, compensation glass plates were designed and incorporated into the Michelson type interferometer objectives. Moreover, a customized chamber set-up featuring an optical access for the observation of the topographical changes at increasing pressure and temperature conditions was constructed and integrated into the apparatus. Conclusively, the in situ monitoring of the elastic deformation of sensing microstructures inside MEMS packages was achieved. These measurements were performed at a defined pressure (0-100 bar) and temperature (25 °C-180 °C).
AB - Advanced optical measurement techniques are always of interest for the characterization of engineered surfaces. When pressure or temperature modules are also incorporated, these techniques will turn into robust and versatile methodologies for various applications such as performance monitoring of devices in service conditions. However, some microelectromechanical systems (MEMS) and MOEMS devices require performance monitoring at their final stage, i.e. enclosed or packaged. That necessitates measurements through a protective liquid, plastic, or glass, whereas the conventional objective lenses are not designed for such media. Correspondingly, in the current study, the development and tailoring of a 3D interferometer as a means for measuring the topography of reflective surfaces under transmissive media is sought. For topography measurements through glass, water and oil, compensation glass plates were designed and incorporated into the Michelson type interferometer objectives. Moreover, a customized chamber set-up featuring an optical access for the observation of the topographical changes at increasing pressure and temperature conditions was constructed and integrated into the apparatus. Conclusively, the in situ monitoring of the elastic deformation of sensing microstructures inside MEMS packages was achieved. These measurements were performed at a defined pressure (0-100 bar) and temperature (25 °C-180 °C).
KW - MEMS
KW - Michelson objectives
KW - interferometry
KW - reliability
KW - topography
UR - https://doi.org/10.1088/1361-6463/aab5d7
U2 - 10.1088/1361-6463/aab5d7
DO - 10.1088/1361-6463/aab5d7
M3 - Article
VL - 51
JO - Journal of Physics D: Applied Physics
JF - Journal of Physics D: Applied Physics
IS - 16
ER -