一种浮雕式岛膜应力集中结构微压传感器芯片及制备方法

Translated title of the contribution: A kind of sculptured island membrane stress concentrating structure micro-pressure sensor chip and preparation method

Libo Zhao (Inventor), Tingzhong Xu (Inventor), Zhuangde Jiang (Inventor), Niancai Peng (Inventor), Jiuhong Wang (Inventor), Xin Guo (Inventor), Yu Xu (Inventor), Guoying Yuan (Inventor), Yulong Zhao (Inventor)

    Research output: Patent

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    Agriculture & Biology