Abstract
The invention discloses a kind of piezoelectricity transmitting capacitance sense high-performance MUT units and preparation method thereof, and the ultrasound emission operating mode of PMUT unit and the ultrasonic reception operating mode of CMUT unit are be combined with each other.The MUT unit perceives film with the circular capacitor for being superimposed on annular membrane upper surface by Piezoelectric Driving annular membrane and forms.In ultrasound emission operating mode, annular membrane is based on inverse piezoelectric effect and is driven, while circular membrane superposed thereon being driven to generate piston type vibration, to improve ultrasound emission directive property and ultrasound output.In ultrasonic reception operating mode, annular membrane and circular membrane are acted on by incident ultrasound generate amount of deflection simultaneously.Due to being superimposed for circular membrane and annular membrane amount of deflection, the stroke variable quantity between capacitor top crown and capacitor bottom crown is increased, to improve unit ultrasonic reception sensitivity；Meanwhile this but also unit under ultrasonic reception mode can using lower bias voltage work in collapsed mode, further increase the ultrasonic reception sensitivity of unit.
| Translated title of the contribution | A kind of piezoelectricity transmitting capacitance sense high-performance MUT unit and preparation method |
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| Original language | Chinese (Simplified) |
| Patent number | CN110523607A |
| Publication status | Published - 2019 |