一种多功能薄膜高灵敏度CMUTs气体传感器及其制备方法

Translated title of the contribution: A kind of multi-function membrane high sensitivity CMUTs gas sensor and preparation method

Zhikang Li (Inventor), Libo Zhao (Inventor), Guoxi Luo (Inventor), Yihe Zhao (Inventor), Jie Li (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zichen Liu (Inventor), qinxiang jia (Inventor), shubei wang (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science