一种多功能薄膜高灵敏度CMUTs气体传感器及其制备方法

Translated title of the contribution: A kind of multi-function membrane high sensitivity CMUTs gas sensor and preparation method

Zhikang Li (Inventor), Libo Zhao (Inventor), Guoxi Luo (Inventor), Yihe Zhao (Inventor), Jie Li (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zichen Liu (Inventor), qinxiang jia (Inventor), shubei wang (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

    Abstract

    The invention discloses a kind of multi-function membrane high sensitivity CMUTs gas sensors and preparation method thereof, the present invention uses graphene, molybdenum disulfide and MXenes (two-dimentional transition metal carbide or nitride) etc. have high elastic modulus simultaneously, vapor sensitivity and the multifunctional material of electric conductivity are as CMUTs sensing element, i.e. single layer free standing structure film is used as CMUTs vibration film simultaneously, top electrode and sensitive material, realize vibration film, the integrated design of the multi-layer compound films such as top electrode and sensitive material, film quality can be effectively reduced, improve unit consistency and resonance frequency, and then it can realize greatly improving for the comprehensive performances such as CMUTs gas sensor detectable limit and detection sensitivity.
    Translated title of the contributionA kind of multi-function membrane high sensitivity CMUTs gas sensor and preparation method
    Original languageChinese (Simplified)
    Patent numberCN110398536A
    Publication statusPublished - 2019

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