一种多参数高选择性CMUTs气体传感器及其使用与制备方法

Translated title of the contribution: A kind of highly selective CMUTs gas sensor of multi-parameter and its use and preparation method

Zhikang Li (Inventor), Libo Zhao (Inventor), Yihe Zhao (Inventor), Jie Li (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zichen Liu (Inventor), Guoxi Luo (Inventor), Lei Li (Inventor), shubei wang (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Physics & Astronomy