Abstract
The invention discloses a kind of praetersonics of electrode shape regulation to receive and dispatch performance CMUTs.Conventional CMUTs's powers on extremely round or polygon, at least covers the central area of free standing structure film；Different from the top electrode structure of conventional CMUTs, through-hole is arranged in the hollow electrode central area of CMUTs of the present invention, and electrode does not cover the central area of free standing structure film.Hollow electrode design of the present invention can reduce the rigidity at free standing structure film center and the clamped thin membrane regions between post area by electrostatic softening effect, keep thin film center region rigidity constant, so that the vibration of class piston type occurs for free standing structure film, to increase the average displacement of entire free standing structure film, the emissive porwer and receiving sensitivity of ultrasonic wave are improved.Hollow electrode CMUTs proposed by the invention solves the problems, such as that conventional CMUTs ultrasound emission is mutually restricted with receptivity, raising while capable of effectively realizing ultrasonic wave transmitting and receptivity, and structure and simple process, it can be used for the Air Couplings application fields such as the identification of ultrasound biological feature, 3D ultrasound gesture recognition.
| Translated title of the contribution | A kind of high ultrasonic transmitting-receiving performance CMUTs with adjustable electrode shape |
|---|---|
| Original language | Chinese (Simplified) |
| Patent number | CN110434044A |
| Publication status | Published - 2019 |