一种高机电耦合系数cmut及其制备方法

Translated title of the contribution: A kind of high electromechanical coupling factor CMUT and preparation method

Zhikang Li (Inventor), Zhuangde Jiang (Inventor), Tingzhong Xu (Inventor), Jie Li (Inventor), Yihe Zhao (Inventor), Guoxi Luo (Inventor), Shuaishuai Guo (Inventor), Libo Zhao (Inventor)

    Research output: Patent

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    Engineering & Materials Science