Abstract
The present invention provides a kind of combined variable rigidity film pMUTs and preparation method thereof, combined variable rigidity membrane structure is by circular membrane and is looped around circular membrane circumferential direction, and concentric annular membrane composition;It is adjusted separately according to thickness of the different duty requirements to circular membrane and annular membrane and realizes combined variable rigidity film;Its overall structure successively includes top electrode, vibration film Piezoelectric Driving layer, lower electrode, vibration film structure sheaf, film support mechanism and underlying structure from top to bottom;When emitting operating mode for ultrasonic wave, by being motivated to circular membrane and annular membrane with certain phase difference, the coupling between circular membrane-fluid media (medium)-annular membrane is caused, unit ultrasound emission power is greatly improved;When receiving for ultrasonic wave, by the resonance frequency deviation of circular membrane and annular membrane structure in fluid media (medium), ultrasonic wide bandwidth receptivity is realized;Built up thin membrane structure pMUTs proposed by the present invention has high transmitting power and wide bandwidth receptivity.
Translated title of the contribution | A kind of combined variable rigidity film pMUTs and preparation method |
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Original language | Chinese (Simplified) |
Patent number | CN109225789A |
Publication status | Published - 2018 |