一种组合式薄膜pMUTs及其制备方法

Translated title of the contribution: A kind of combined film pMUTs and preparation method

Libo Zhao (Inventor), Tingzhong Xu (Inventor), Zhikang Li (Inventor), Shuaishuai Guo (Inventor), Jie Li (Inventor), Yihe Zhao (Inventor), Yulong Zhao (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science