Abstract
The present invention provides a kind of combined film pMUTs and preparation method thereof, built up thin membrane structure is by circular membrane and is looped around circular membrane circumferential direction, and concentric annular membrane composition, overall structure successively include top electrode, vibration film Piezoelectric Driving layer, lower electrode, vibration film structure sheaf, film support mechanism and underlying structure from top to bottom；When emitting operating mode for ultrasonic wave, by being motivated to circular membrane and annular membrane with certain phase difference, the coupling between circular membrane-fluid media (medium)-annular membrane is caused, unit ultrasound emission power is greatly improved；When receiving operating mode for ultrasonic wave, circular membrane and annular membrane vibrate, and generate detectable electric signal, while by the resonance frequency deviation of circular membrane and annular membrane structure in fluid media (medium), realizing the wide bandwidth receptivity of ultrasound.Built up thin membrane structure pMUTs proposed by the present invention has high transmitting power and wide bandwidth receptivity.
| Translated title of the contribution | A kind of combined film pMUTs and preparation method |
|---|---|
| Original language | Chinese (Simplified) |
| Patent number | CN109231150A |
| Publication status | Published - 2018 |