Abstract
The invention discloses a kind of combination drive MUT cellular construction and its parametrization motivational techniques, and the driving method for collapsing operating mode and PMUT unit of traditional CMUT unit is combined.In ultrasound emission state, vibration film is made to be in collapsed mode by applying bias voltage.It is superimposed periodic signal on the basis of collapsing bias voltage simultaneously, so that vibration film collapses region and the fit-state generating period of sensor base changes, realizes and the periodicity of vibration film bending stiffness is regulated and controled.Meanwhile to remaining non-fitting part film, ultrasonic emission method using PMUT based on inverse piezoelectric effect realizes vibration amplification of MUT unit under the conditions of variation rigidity, realizes the parametrization excitation of MUT unit, increases the transmitting sensitivity of MUT unit.
| Translated title of the contribution | A kind of combination drive MUT cellular construction and its parametrization motivational techniques |
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| Original language | Chinese (Simplified) |
| Patent number | CN110508474A |
| Publication status | Published - 2019 |