一种CMUTs流体密度传感器及其制备方法

Translated title of the contribution: A kind of CMUTs fluid density sensor and preparation method

Libo Zhao (Inventor), Jiawang Zhang (Inventor), Zhikang Li (Inventor), Jie Li (Inventor), Dejiang Lu (Inventor), Yihe Zhao (Inventor), Tingzhong Xu (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science