一种CMUTs流体密度传感器及其制备方法

Translated title of the contribution: A kind of CMUTs fluid density sensor and preparation method

Libo Zhao (Inventor), Jiawang Zhang (Inventor), Zhikang Li (Inventor), Jie Li (Inventor), Dejiang Lu (Inventor), Yihe Zhao (Inventor), Tingzhong Xu (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

    Abstract

    The invention discloses a kind of CMUTS fluid density sensor and preparation method thereof, CMUTs cellular construction includes substrate, lower electrode, silica thermal stress matching layer, silica pillar, silica vibration film layer, endless metal top electrode, silicon dioxide insulating layer, acoustic impedance matching layer and sound-proof wall.The present invention is using annular membrane as vibrational structure, resonance frequency and Density Detection sensitivity are improved compared to traditional circular membrane, sound-proof wall can effectively reduce the ultrasound mutually radiation in CMUTs array between unit simultaneously, to make sensor have higher precision, the setting of impedance matching layer can effectively improve the intensity of CMUTs detection signal;The upper/lower electrode of CMUTs is covered using the insulating silicon dioxide of low thermal coefficient of expansion, sensor is enable to work in the measurement environment of high temperature, conduction and corrosive fluid.
    Translated title of the contributionA kind of CMUTs fluid density sensor and preparation method
    Original languageChinese (Simplified)
    Patent numberCN108918662A
    Publication statusPublished - 2018

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