Abstract
The region setting belt stress for being fixed on abutment surface of the invention discloses a kind of Air Coupling CMUT and preparation method thereof with T shape cavity structure, vibration film discharge groove；Its cavity shape is T-shaped, i.e., electrode distance is greater than around cavity the electrode distance between post area upper/lower electrode between the upper/lower electrode of cavity center region.The present invention designs to reduce the electrode distance between cavity peripheral region upper/lower electrode using T shape cavity, so as to increase film average displacement under conditions of not influencing film peak swing, and then increases output acoustic pressure, improves electromechanical coupling factor and receiving sensitivity.In addition, constraint of the film fixed area to deformation of thin membrane can be further decreased by the method that film fixing end opens up stress release groove, increase deformation of thin membrane, improves output acoustic pressure.
| Translated title of the contribution | A kind of Air Coupling CMUT and preparation method thereof with T shape cavity structure |
|---|---|
| Original language | Chinese (Simplified) |
| Patent number | CN109174595A |
| Publication status | Published - 2018 |