1.2 - Position Encoding and Phase Control of Resonant 2D-MOEMS-Mirrors

A. Tortschanoff, A. Frank, M. Lenzhofer, A. Kenda, M Wildenhain, T. Sandner

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

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TY - CONF

T1 - 1.2 - Position Encoding and Phase Control of Resonant 2D-MOEMS-Mirrors

AU - Tortschanoff, A.

AU - Frank, A.

AU - Lenzhofer, M.

AU - Kenda, A.

AU - Wildenhain, M

AU - Sandner, T.

PY - 2009

Y1 - 2009

UR - https://www.mendeley.com/catalogue/56d58677-c17e-3605-8bb9-c9e6605b70e0/

U2 - 10.5162/opto11/o1.2

DO - 10.5162/opto11/o1.2

M3 - Paper

ER -