Intelligente Sensorsysteme in der Halbleitermaschinenproduktion für prädiktive Instandhaltung

Hirschl, Christina (PI)

Sensor Systems

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2020

Automatic Anomaly Detection on In-Production Manufacturing Machines Using Statistical Learning Methods
Pittino, F., Puggl, M., Moldaschl, T. & Hirschl, C., 20 Apr 2020, In: Sensors.
Research output: Contribution to journal › Article › peer-review