ASSIC - Project 3.1 Smart Systems Solutions for Micro- and Nano-sized Contaminats

Conference Paper

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  • 2020

    Stress analysis of Si chip sidewalls using micro-Raman spectroscopy

    Biasio, M. D., Ong, R., Seifert, C., Ossiander, I., Bernard, B., Roesner, M. & Kraft, M., 2020, Next-Generation Spectroscopic Technologies XIII. Profeta, L. T. M., Azad, A. K. & Barnett, S. M. (eds.). Vol. 11390. p. 118 - 123

    Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review