Physics & Astronomy
thin films
100%
resonators
99%
acoustics
44%
scandium
38%
seeds
32%
microelectromechanical systems
29%
transducers
28%
sapphire
23%
acoustic excitation
23%
wurtzite
23%
Lamb waves
21%
wave excitation
20%
reflectors
19%
temperature sensors
19%
Q factors
18%
shear
18%
aluminum nitrides
16%
nitrides
16%
crystallites
15%
nucleation
15%
acoustic delay lines
15%
filters
15%
vacuum
13%
sputtering
13%
grain boundaries
13%
pistons
12%
coupling coefficients
12%
aluminum
12%
film thickness
12%
stiffness matrix
11%
electrodes
11%
impedance matching
11%
oxides
11%
strontium titanates
10%
fabrication
10%
piezoelectricity
10%
acoustic impedance
10%
flat surfaces
10%
electric fields
10%
etching
10%
barium titanates
9%
geometry
9%
acoustic velocity
9%
sensors
8%
excitation
8%
simulation
8%
textures
7%
substitutes
7%
performance
7%
tuning
6%
Engineering & Materials Science
Parameter extraction
22%
Accelerometers
22%
Resonators
22%
Surface waves
19%
Pressure sensors
18%
Microphones
18%
Transducers
16%
Thin films
16%
MEMS
16%
Acoustic waves
13%
Acoustic wave velocity
8%
Elastic constants
7%
Antennas
7%
Single crystals
6%
Curve fitting
6%
Mirrors
6%
Electron microscopes
5%
