Dr. Tingzhong Xu

Search results

• 2023

  Dynamic Beamforming Strategy for Sidelobe Level Suppression in Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Sparse Arrays

  Da, Z., Xu, T., Moridi, M. & Savoia, A. S., 2023, (Accepted/In press) IEEE International Ultrasonics Symposium (IUS) 2023.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• 2021

  A PMUT-based Ultrasonic Probe Used for Contact Force Sensing

  Xu, T., Zhao, L., Li, Z., Yuan, J., Zhao, Y., Luo, G., Li, J., Li, Z., Yang, P. & Jiang, Z., 29 Jan 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). p. 419-422 4 p. 9375405

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • Ultrasonic transducers 100%
  • Piezoelectric transducers 93%
  • Ultrasonics 60%
  • Analytical models 19%
  • Bandwidth 14%

• Bandwidth Extension Technique of Piezoelectric Micromachined Ultrasonic Transducers for Air Coupled Applications

  Xu, T., Wu, L. & Moridi, M., 2021.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  • transducers 100%
  • ultrasonics 92%
  • bandwidth 85%
  • air 73%
  • vibration mode 56%

• Closed-Form Expressions on CMUTs With Layered Anisotropic Microplates Under Residual Stress and Pressure

  Li, Z., Zhao, L., Zhao, Y., Li, J., Xu, T., Hu, K., Liu, Z., Yang, P., Luo, G., Lin, Q., Zhang, S., Hartel, M. C., Zhang, W. & Jiang, Z., 1 May 2021, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 68, 5, p. 1828-1843 16 p., 9256279.

  Research output: Contribution to journal › Article › peer-review

  • Ultrasonic transducers 100%
  • residual stress 64%
  • Residual stresses 61%
  • transducers 57%
  • ultrasonics 53%

• Equivalent Circuit Model for a Large Array of Coupled Piezoelectric Micromachined Ultrasonic Transducers with High Emission Performance

  University, X., Zhao, L., Jiang, Z., Guo, S., Li, Z., Yang, P., Luo, G., Sun, L. & Zhang, L., 1 Mar 2021, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 68, 3, p. 718-733 16 p.

  Research output: Contribution to journal › Article › peer-review

  File

  • Ultrasonic transducers 100%
  • Piezoelectric transducers 93%
  • Diaphragms 76%
  • equivalent circuits 72%
  • Equivalent circuits 68%

• Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress

  Li, Z., Zhao, L., Li, J., Zhao, Y., University, X., Liu, Z., Luo, G., Zhang, S., Hu, K., Hoffman, T., Saghir, S., Lu, D., Zhang, W. & Jiang, Z., 1 Jan 2021, In: Composite Structures. 255

  Research output: Contribution to journal › Article › peer-review

  Open Access

  File

  • Residual Stress 100%
  • Anisotropy 78%
  • Multilayers 72%
  • Multilayer 67%
  • Residual stresses 65%
• 2020

  Analytical Expressions for the Electromechanical Coupling Coefficient of Capacitive Micromachined Ultrasonic Transducers (CMUTs) and Its Effects on Power Consumption

  Li, Z., Zhao, L., Li, J., Zhao, Y., Xu, T., Luo, G., Guo, S., Liu, Z. & Jiang, Z., 5 Sept 2020, In: Jixie Gongcheng Xuebao/Journal of Mechanical Engineering. 56, 17, p. 173-181 9 p.

  Research output: Contribution to journal › Article › peer-review

  • Electromechanical Coupling 100%
  • Power Consumption 87%
  • Ultrasonic transducers 76%
  • Electromechanical coupling 75%
  • Transducer 64%

• A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process

  Huang, M., Zhao, L., Xu, T., Jia, C., Yang, P., Li, Z., Wang, H., Wu, Y. & Jiang, Z., 27 Sept 2020, 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020. Institute of Electrical and Electronics Engineers Inc., p. 167-170 4 p. (15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • peninsulas 100%
  • low pressure 51%
  • etching 46%
  • pressure sensors 33%
  • diaphragms 23%

• Array Design of Piezoelectric Micromachined Ultrasonic Transducers with Low-Crosstalk and High-Emission Performance

  Xu, T., Zhao, L., Jiang, Z., Guo, S., Li, Z., Yang, P., Sun, L., Luo, G. & Zhang, L., 1 Apr 2020, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 67, 4, p. 789-800 12 p.

  Research output: Contribution to journal › Article › peer-review

  • Ultrasonic transducers 100%
  • Piezoelectric transducers 93%
  • Crosstalk 79%
  • crosstalk 71%
  • transducers 57%

• Design and Experimental Characterization of CMUTs Based on Eutectic Bonding Technology

  Li, Z., Zhao, L., Zhao, Y., Li, J., Guo, S., Luo, G., Xu, T., Liu, Z., Li, X. & Jiang, Z., 5 Jul 2020, In: Jixie Gongcheng Xuebao/Journal of Mechanical Engineering. 56, 13, p. 67-76 10 p.

  Research output: Contribution to journal › Article › peer-review

  • Ultrasonic transducers 100%
  • Transducer 83%
  • Eutectics 74%
  • Design 43%
  • Fabrication 40%

• Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer

  Xu, T., Zhao, L., Jiang, Z., Guo, S., Li, Z., Yang, P., Luo, G., Sun, L. & Zhang, L., 1 Oct 2020, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 67, 10, p. 2103-2118 16 p.

  Research output: Contribution to journal › Article › peer-review

  • Ultrasonic transducers 100%
  • Cavity resonators 98%
  • Piezoelectric transducers 93%
  • cavity resonators 76%
  • equivalent circuits 72%

• Shielding effectiveness simulation of rectangular enclosures using fit

  Zhao, Y., Zhao, L., Huang, M., Li, Z., Yang, P., Li, J., Liu, Z., Li, Z., Xu, T., Lu, D. & Jiang, Z., 5 Aug 2020, Proceedings of 2020 International Conference on Sensing, Diagnostics, Prognostics, and Control, SDPC 2020. Institute of Electrical and Electronics Engineers Inc., p. 317-321 5 p. (Proceedings of 2020 International Conference on Sensing, Diagnostics, Prognostics, and Control, SDPC 2020).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • Enclosures 100%
  • Shielding 98%
  • Electromagnetic shielding 91%
  • Signal interference 65%
  • Electromagnetic waves 33%

• 压电式微加工超声传感器的关键技术研究

  Translated title of the contribution: Research on Key Technologies of Piezoelectric Micromachined Ultrasound TransducersXu, T., Sept 2020

  Research output: Types of Thesis › Doctoral Thesis

  • Ultrasonic transducers 100%
  • Piezoelectric transducers 88%
  • Transducers 66%
  • Ultrasonics 60%
  • Equivalent circuits 18%
• 2019

  A CMUT-based gas density sensor with high sensitivity

  Zhao, L., Li, J., Li, Z., Zhao, Y., Luo, G., Xu, T., Guo, S., Liu, Z., Wang, J. & Jiang, Z., 18 Sept 2019, In: Journal of Micromechanics and Microengineering. 29, 11

  Research output: Contribution to journal › Article › peer-review

  • Density of gases 100%
  • Ultrasonic transducers 98%
  • Natural frequencies 41%
  • Gas 36%
  • Sensors 35%

• An Analytical Equivalent Circuit Model for Optimization Design of a Broadband Piezoelectric Micromachined Ultrasonic Transducer with an Annular Diaphragm

  Xu, T., Zhao, L., Jiang, Z., Guo, S., Li, Z., Luo, G., Sun, L. & Zhang, L., 2019, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 66, 11, p. 1760-1776 17 p.

  Research output: Contribution to journal › Article › peer-review

  • Ultrasonic transducers 100%
  • Piezoelectric transducers 93%
  • design optimization 86%
  • diaphragms 79%
  • Diaphragms 76%

• A Through-Hole Capacitive Micromachined Ultrasonic Transdcuer with High Perfromance

  Li, J., Zhao, L., Lu, D., Li, Z., Zhao, Y., Xu, T., Guo, S., Wang, J., Zhao, Y. & Jiang, Z., 14 Apr 2019, 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). p. 181-186 6 p. 8915605

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • capacitance 100%
  • ultrasonics 94%
  • coupling coefficients 88%
  • membranes 61%
  • electric potential 45%

• Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air

  Zhao, Y., Zhao, L., Li, Z., Li, J., Yang, P., Xu, T., Liu, Z., Guo, S., Wang, J. & Jiang, Z., 30 Oct 2019, In: Journal of Micromechanics and Microengineering. 29, 12

  Research output: Contribution to journal › Article › peer-review

  • Ultrasonic transducers 100%
  • Ultrasonics 60%
  • Voltage 51%
  • Parasitic 43%
  • Air 38%

• CMUTs谐振式生化传感器的低电压阻抗匹配方法及匹配网络

  Translated title of the contribution: CMUTsThe low-voltage impedance matching process and matching network of resonant mode biochemical sensorZhao, L., Zhao, Y., Li, Z., Li, J., Yang, P., Xu, T., Liu, Z., Guo, S., Lu, D. & Jiang, Z., 2019, Patent No. CN110224682A

  Research output: Patent

  • Electric potential 100%
  • Sensors 99%
  • Equivalent circuits 93%
  • Patents and inventions 76%
  • Tuning 75%

• Cmuts谐振式生化传感器的频率追踪电路

  Translated title of the contribution: The frequency tracking circuit of resonant mode biochemical CMUTS sensorZhao, L., Zhao, Y., Li, Z., Li, J., Yang, P., Xu, T., Liu, Z., Guo, S., Lu, D. & Jiang, Z., 2019, Patent No. CN110221123A

  Research output: Patent

  • Electronic circuit tracking 100%
  • Patents and inventions 48%
  • Capacitance 35%
  • Circuit resonance 32%
  • Sensors 31%

• Resonant Frequency Analysis of Capacitive Micromachined Ultrasonic Transducers (CMUTs) with Layered Membranes

  Li, Z., Zhao, L., Li, J., Zhao, Y., Xu, T., Luo, G., Li, X., Guo, S. & Jiang, Z., 20 Dec 2019, In: Jixie Gongcheng Xuebao/Journal of Mechanical Engineering. 55, 24, p. 11-20 10 p.

  Research output: Contribution to journal › Article › peer-review

  • Resonant Frequency 100%
  • Ultrasonic transducers 92%
  • Frequency Analysis 92%
  • Transducer 77%
  • Membrane 65%

• Smith Matching for CMUTs-based Biochemical Resonant Sensor

  Zhao, Y., Zhao, L., Hebibul, R., Li, Z., Li, J., Xu, T., Guo, S., Wang, J., Zhao, Y. & Jiang, Z., 14 Apr 2019, 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). p. 312-316 5 p. 8915626

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • Ultrasonic transducers 100%
  • Sensors 36%
  • Acoustic impedance 25%
  • Stability criteria 13%
  • Fabrication 8%

• 一种压电发射电容感知高性能mut单元及其制备方法

  Translated title of the contribution: A kind of piezoelectricity transmitting capacitance sense high-performance MUT unit and preparation methodZhao, L., Guo, S., Xu, T., Li, Z., Yang, P., Li, J., Zhao, Y., Liu, Z. & Jiang, Z., 2019, Patent No. CN110523607A

  Research output: Patent

  • Piezoelectricity 100%
  • Capacitance 61%
  • Ultrasonics 60%
  • Membranes 48%
  • Capacitors 16%

• 一种多功能薄膜高灵敏度CMUTs气体传感器及其制备方法

  Translated title of the contribution: A kind of multi-function membrane high sensitivity CMUTs gas sensor and preparation methodLi, Z., Zhao, L., Luo, G., Zhao, Y., Li, J., Xu, T., Guo, S., Liu, Z., jia, Q., wang, S. & Jiang, Z., 2019, Patent No. CN110398536A

  Research output: Patent

  • Chemical sensors 100%
  • Membranes 74%
  • Patents and inventions 41%
  • Electrodes 27%
  • Transition metals 26%

• 一种多参数高选择性CMUTs气体传感器及其使用与制备方法

  Translated title of the contribution: A kind of highly selective CMUTs gas sensor of multi-parameter and its use and preparation methodLi, Z., Zhao, L., Zhao, Y., Li, J., Xu, T., Guo, S., Liu, Z., Luo, G., Li, L., wang, S. & Jiang, Z., 2019, Patent No. CN110361445A

  Research output: Patent

  • preparation 100%
  • inventions 88%
  • sensors 83%
  • gases 70%
  • electrodes 56%

• 一种混合驱动mut单元结构及其参数化激励方法

  Translated title of the contribution: A kind of combination drive MUT cellular construction and its parametrization motivational techniquesZhao, L., Xu, T., Guo, S., Li, Z., Yang, P., Li, J., Zhao, Y., Liu, Z. & Jiang, Z., 2019, Patent No. CN110508474A

  Research output: Patent

  • Bias voltage 100%
  • Ultrasonics 68%
  • Piezoelectricity 56%
  • Patents and inventions 47%
  • Amplification 40%

• 一种电极形状调控的高超声波收发性能CMUTs

  Translated title of the contribution: A kind of high ultrasonic transmitting-receiving performance CMUTs with adjustable electrode shapeLi, Z., Zhao, L., Li, J., Guo, S., Hu, K., Zhang, W., Xu, T., Zhao, Y., Liu, Z. & Jiang, Z., 2019, Patent No. CN110434044A

  Research output: Patent

  • Ultrasonics 100%
  • Patents and inventions 91%
  • Electrodes 89%
  • Ultrasonic waves 49%
  • Rigidity 39%

• 一种通孔电容式微加工超声换能器及其制备方法

  Translated title of the contribution: kind of through-hole capacitance type micromachined ultrasonic energy converter and preparation methodZhao, L., Li, J., Li, Z., Lu, D., Zhao, Y., Xu, T., Guo, S., Liu, Z. & Jiang, Z., 2019, Patent No. CN110217753A

  Research output: Patent

  • Ultrasonic transducers 100%
  • Capacitance 60%
  • Ultrasonics 60%
  • Electrodes 54%
  • Electromechanical coupling 49%

• 变频自聚焦混合驱动收发一体化pmut单元及其制备方法

  Translated title of the contribution: Transceiving integrated PMUT unit of frequency conversion self-focusing combination drive and preparation methodZhao, L., Xu, T., Guo, S., Li, Z., Yang, P., Li, J., Zhao, Y., Liu, Z. & Jiang, Z., 2019, Patent No. CN110518114A

  Research output: Patent

  • Ultrasonics 100%
  • Bias voltage 36%
  • Patents and inventions 34%
  • Sensors 30%
  • Rigidity 29%

• 基于MOSFET的CMUTs谐振信号输出网络

  Translated title of the contribution: CMUT based on MOSFETsResonance signal exports networkZhao, L., Zhao, Y., Li, Z., Li, J., Yang, P., Xu, T., Liu, Z., Guo, S., Lu, D. & Jiang, Z., 2019, Patent No. CN110247628A

  Research output: Patent

  • Patents and inventions 100%
  • Feedback 80%
  • Circuit resonance 66%
  • Electric potential 65%
  • Capacitors 33%
• 2018

  A Novel Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on Parametric Excitation Method

  Xu, T., Zhao, L., Lu, D., Jiang, Z., Cui, Z. & Zhang, J., 3 Dec 2018, NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., p. 240-244 5 p. (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • transducers 100%
  • ultrasonics 92%
  • air 73%
  • excitation 59%
  • electric potential 33%

• Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance

  Xu, T., Zhao, L., Jiang, Z., Cui, Z., Zhang, J., Li, J., Li, Z. & Zhao, Y., 3 Dec 2018, NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., p. 151-154 4 p. (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • Dimension 100%

• High Temperature Silicon Pressure Sensors

  Jiang, Z., Zhao, Y., Zhao, L. & Xu, T., 2018, Micro Electro Mechanical Systems. p. 325-385 61 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

• Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System

  Xu, T., Zhao, L., Lu, D., Li, Z., Zhao, N. & Jiang, Z., 3 Dec 2018, NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., p. 216-220 5 p. (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • diaphragms 100%
  • transducers 72%
  • ultrasonics 67%
  • excitation 43%
  • resonant frequencies 11%

• 一种CMUTs流体密度传感器及其制备方法

  Translated title of the contribution: A kind of CMUTs fluid density sensor and preparation methodZhao, L., Zhang, J., Li, Z., Li, J., Lu, D., Zhao, Y., Xu, T. & Jiang, Z., 2018, Patent No. CN108918662A

  Research output: Patent

  • Silica 100%
  • Fluids 62%
  • Sensors 49%
  • Patents and inventions 45%
  • Electrodes 44%

• 一种具有t形空腔结构的空气耦合cmut及其制备方法

  Translated title of the contribution: A kind of Air Coupling CMUT and preparation method thereof with T shape cavity structureLi, Z., Zhao, L., Zhao, Y., Li, J., Xu, T., Luo, G., Guo, S. & Jiang, Z., 2018, Patent No. CN109174595A

  Research output: Patent

  • Electrodes 100%
  • Air 71%
  • Patents and inventions 51%
  • Membranes 36%
  • Acoustics 35%

• 一种梳齿式CMUTs流体密度传感器及其制备方法

  Translated title of the contribution: A kind of comb-tooth-type CMUTs fluid density sensor and preparation methodZhao, L., Li, J., Li, Z., Lu, D., Zhao, Y., Zhang, J., Xu, T. & Jiang, Z., 2018, Patent No. CN108982291A

  Research output: Patent

  • teeth 100%
  • preparation 64%
  • electrodes 54%
  • sensors 54%
  • fluids 52%

• 一种组合式变刚度薄膜pMUTs及其制备方法

  Translated title of the contribution: A kind of combined variable rigidity film pMUTs and preparation methodJi, J., Bai, M., Xu, T. & Li, Y., 2018, Patent No. CN109225789A

  Research output: Patent

  • Rigidity 100%
  • Membranes 83%
  • Membrane structures 41%
  • Ultrasonic waves 25%
  • Patents and inventions 23%

• 一种组合式薄膜pMUTs及其制备方法

  Translated title of the contribution: A kind of combined film pMUTs and preparation methodZhao, L., Xu, T., Li, Z., Guo, S., Li, J., Zhao, Y., Zhao, Y. & Jiang, Z., 2018, Patent No. CN109231150A

  Research output: Patent

  • Membranes 100%
  • Membrane structures 49%
  • Ultrasonic waves 30%
  • Patents and inventions 27%
  • Ultrasonics 20%

• 一种高机电耦合系数cmut及其制备方法

  Translated title of the contribution: A kind of high electromechanical coupling factor CMUT and preparation methodLi, Z., Jiang, Z., Xu, T., Li, J., Zhao, Y., Luo, G., Guo, S. & Zhao, L., 2018, Patent No. CN109092650A

  Research output: Patent

  • Electromechanical coupling 100%
  • Electrodes 54%
  • Insulating materials 19%
  • Permittivity 15%
  • Capacitance 13%

• 静电-压电混合驱动收发一体化cmut及其使用方法和制备方法

  Translated title of the contribution: Electrostatic-transceiving integrated CMUT of piezoelectricity combination drive and its application method and preparation methodLi, Z., Zhao, L., Li, J., Zhao, Y., Luo, G., Xu, T., Guo, S. & Jiang, Z., 2018, Patent No. CN109092649A

  Research output: Patent

  • Piezoelectricity 100%
  • Electrostatics 76%
  • Ultrasonic waves 38%
  • Electrodes 31%
  • Ultrasonics 17%
• 2017

  A novel piezoresistive sensitive structure for micromachined high-pressure sensors

  Guo, X., Hebibul, R., Jiang, Z., Zhao, L., Xu, T., Zhao, Z., Li, Z., Xu, Y. & Gao, W., 25 Aug 2017, 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., p. 728-731 4 p. (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • pressure sensors 100%
  • cavities 56%
  • performance 20%
  • nonlinearity 17%
  • sensitivity 13%

• Application and optimization of stiffness abruption structures for pressure sensors with high sensitivity and anti-overload ability

  Xu, T., Lu, D., Zhao, L., Jiang, Z., Wang, H., Guo, X., Li, Z., Zhou, X. & Zhao, Y., 1 Sept 2017, In: Sensors. 17, 9

  Research output: Contribution to journal › Article › peer-review

  • Pressure Sensor 100%
  • diaphragms 80%
  • pressure sensors 78%
  • Diaphragms 77%
  • Pressure sensors 76%

• Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure

  Xu, T., Wang, H., Xia, Y., Zhao, Z., Huang, M., Wang, J., Zhao, L., Zhao, Y. & Jiang, Z., 1 Dec 2017, In: Frontiers of Mechanical Engineering. 12, 4, p. 546-553 8 p.

  Research output: Contribution to journal › Article › peer-review

  • Medical applications 100%
  • Pressure sensors 94%
  • Pressure measurement 24%
  • Biomedical equipment 24%
  • MEMS 20%

• 一种支撑梁式mems流体热导率和热扩散系数传感器及其制备和测试方法

  Translated title of the contribution: One kind support beam type MEMS fluids thermal conductivity and thermal diffusion coefficient sensor and its preparation and method of testingZhao, L., Huang, X., Xia, Y., Xu, T., Guo, X. & Luo, Y., 2017, Patent No. CN107037079A

  Research output: Patent

  • beams (supports) 100%
  • thermal diffusion 69%
  • heaters 63%
  • microelectromechanical systems 59%
  • diffusion coefficient 50%
• 2016

  A bossed diaphragm piezoresistive pressure sensor with a peninsula-island structure for the ultra-low-pressure range with high sensitivity

  Zhao, L., Xu, T., Hebibul, R., Jiang, Z., Ding, J., Peng, N., Guo, X., Xu, Y., Wang, H. & Zhao, Y., 25 Oct 2016, In: Measurement Science and Technology. 27, 12

  Research output: Contribution to journal › Article › peer-review

  • Pressure Sensor 100%
  • peninsulas 79%
  • Chip 62%
  • Sensor 57%
  • diaphragms 55%

• A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

  Xu, T., Zhao, L., Jiang, Z., Guo, X., Ding, J., Xiang, W. & Zhao, Y., 15 Jun 2016, In: Sensors and Actuators A: Physical. 244, p. 66-76 11 p.

  Research output: Contribution to journal › Article › peer-review

  • peninsulas 100%
  • Pressure Sensor 86%
  • diaphragms 69%
  • pressure sensors 67%
  • Diaphragms 67%

• Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams

  Xu, Y., Zhao, L., Jiang, Z., Ding, J., Xu, T. & Zhao, Y., 15 Aug 2016, In: Sensors and Actuators A: Physical. 247, p. 1-11 11 p.

  Research output: Contribution to journal › Article › peer-review

  • accelerometers 100%
  • Figure of Merit 97%
  • Accelerometers 80%
  • Simulation 53%
  • resonant frequencies 32%

• Analysis of the 3ω method for the measurement of fluid thermal properties

  Huang, X., Hebibul, R., Zhao, L., Xu, T., Zhao, Y. & Jiang, Z., 28 Nov 2016, 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016. Institute of Electrical and Electronics Engineers Inc., p. 196-199 4 p. (2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016).

  Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

  • heaters 100%
  • thermodynamic properties 78%
  • fluids 57%
  • thermal conductivity 21%
  • three dimensional models 16%

• A novel slope method for measurement of fluid density with a micro-cantilever under flexural and torsional vibrations

  Zhao, L., Hu, Y., Hebibul, R., Ding, J., Wang, T., Xu, T., Liu, X., Zhao, Y. & Jiang, Z., 11 Sept 2016, In: Sensors. 16, 9

  Research output: Contribution to journal › Article › peer-review

  • torsional vibration 100%
  • Vibration 81%
  • slopes 55%
  • Voltage 53%
  • Fluids 47%

• Modeling and analysis of a novel combined peninsula-island structure diaphragm for ultra-low pressure sensing with high sensitivity

  Xu, T., Zhao, L., Jiang, Z., Xu, Y. & Zhao, Y., 20 Jan 2016, In: Journal of Physics D: Applied Physics. 49, 7

  Research output: Contribution to journal › Article › peer-review

  • peninsulas 100%
  • Strain Energy 78%
  • diaphragms 69%
  • Diaphragms 67%
  • low pressure 51%