Engineering & Materials Science
Acceleration measurement
7%
Accelerometers
9%
Acoustic impedance
6%
Air
5%
Anisotropy
8%
Bias voltage
14%
Capacitance
16%
Cavity resonators
9%
Chemical sensors
5%
Circuit resonance
5%
Crosstalk
11%
Density of gases
7%
Diaphragms
35%
Electric potential
20%
Electrodes
23%
Electromechanical coupling
19%
Electronic circuit tracking
8%
Electrostatic force
9%
Electrostatics
8%
Enclosures
5%
Equivalent circuits
19%
Eutectics
5%
Feedback
5%
Finite element method
7%
Fluids
8%
Galerkin methods
6%
Hydrostatic pressure
5%
Medical applications
5%
Membrane structures
5%
Membranes
26%
MEMS
5%
Multilayers
9%
Natural frequencies
17%
Patents and inventions
32%
Piezoelectric transducers
39%
Piezoelectricity
15%
Pressure sensors
32%
Residual stresses
8%
Rigidity
11%
Sensors
21%
Shielding
5%
Silica
5%
Stiffness
5%
Thin films
5%
Transducers
5%
Ultrasonic transducers
100%
Ultrasonic waves
7%
Ultrasonics
41%
Physics & Astronomy
accelerometers
5%
air
6%
beams (supports)
8%
cavities
6%
cavity resonators
6%
cells
7%
chips
21%
crosstalk
9%
design optimization
6%
diaphragms
41%
electric potential
6%
electrodes
5%
equivalent circuits
16%
excitation
7%
fluids
11%
heaters
10%
inventions
7%
low pressure
14%
microelectromechanical systems
6%
nonlinearity
5%
optimization
7%
peninsulas
36%
performance
8%
preparation
14%
pressure sensors
30%
residual stress
5%
resonant frequencies
7%
sensitivity
18%
sensors
17%
stiffness
7%
stress concentration
5%
teeth
5%
thermal conductivity
5%
thermal diffusion
5%
torsional vibration
6%
transducers
32%
ultrasonics
34%
Mathematics
Chip
9%
Electromechanical Coupling
9%
Frequency Analysis
7%
Membrane
6%
Power Consumption
8%
Pressure Sensor
10%
Resonant Frequency
8%
Sensor
5%
Transducer
17%
Voltage
7%