Dr. Nikolai Andrianov

Search results

• 2023

  Acoustofluidic Trapping in Structured Microchannels Using Lateral Transducer Modes

  Fuchsluger, A., De Pastina, A., Mitteramskogler, T., Ecker, R., Voglhuber-Brunnmaier, T., Andrianov, N., Shatalov, A., Cselyuszka, N., Moridi, M. & Jakoby, B., Nov 2023.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  Open Access

  • microchannels 100%
  • transducers 76%
  • trapping 72%
  • cavities 57%
  • standing waves 36%

• Aluminum nitride on insulator: Material and processing optimization for integrated photonic applications

  Spettel, J., Andrianov, N., Dubois, F., Furci, H., Cassese, T., Liffredo, M., Villanueva, L. G., Quack, N., Moridi, M. & Dao, T. D., 2023, EPJ Web of Conferences. Vol. 287.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

  Open Access

  • aluminum nitrides 100%
  • insulators 64%
  • photonics 60%
  • optimization 57%
  • ellipsometry 21%

• Design and Fabrication of aluminum nitride integrated photonics devices

  Spettel, J., Andrianov, N., Cassese, T., Furci, H., Dubois, F., Quack, N., Moridi, M., Villanueva, L. G. & Dao, T. D., 2023.

  Research output: Contribution to conference (No Proceedings) › Poster

• Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements

  Wu, L., Zhai, Y., Lokesh, O., Bourquard, C., Abbaszadeh, J., Andrianov, N., Garcia souto, J. A., Nguyen, T. A. T., Chen, X., Erbacher, K., Ngo, H-D., Sainges, O. & Julliard, E., 8 Jun 2023.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

• Dual-frequency piezoelectric micromachined ultrasonic transducers for fundamental and harmonic imaging

  Zhai, Y., Maqsood, W., Da, Z., Andrianov, N., 张俞骋, Moridi, M. & Wu, L., 2023, IEEE MEMS.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  File

  • transducers 100%
  • ultrasonics 92%
  • harmonics 84%

• Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing

  Roshanghias, A., Kaczynski, J., Rodrigues, A., Hübner, M., Zauner, M., Grosso, G., Andrianov, N., Khan, M., Grömer, T., Fuchs, T. & Binder, A., 29 Sept 2023, In: ECS Transactions.

  Research output: Contribution to journal › Article › peer-review

  • gyroscopes 100%
  • microelectromechanical systems 87%
  • vapors 68%
  • wafers 68%
  • nuclear magnetic resonance 54%

• Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications

  Dao, T. D., Andrianov, N., Chouiki, M., Azeem, S. M., Spettel, J., Dubois, F., Fleury, C., Pilz, J., Moridi, M. & Vojkuvka, L., Jul 2023.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  Open Access

  • engineering 100%
  • interactions 53%

• Highly Selective Plasma Etching Technique for Molybdenum: Highly Selective Plasma Etching Technique for Molybdenum

  Osipov, A., Andrianov, N., Speshilova, A., Gagaeva, A., Risquez, S., Vorobyev, A. & Alexandrov, S., 18 Feb 2023, In: Plasma Chemistry and Plasma Processing. p. 1-11 11 p.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  • Plasma etching 100%
  • Molybdenum 78%
  • plasma etching 75%
  • Etching 72%
  • molybdenum 66%

• Non-destructive Na content analysis in bonded silicon-glass microcavities using laser-induced breakdown spectroscopy

  Bereczki, T., Cselyuszka, N., 张俞骋, Guso, E., Fugger-Schafhauser, D. M., Menezes de Oliveira, B. N., Roshanghias, A. & Andrianov, N., 2023, Optical Waveguide and Laser Sensors II,.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • laser-induced breakdown spectroscopy 100%
  • cathodes 49%
  • glass 47%
  • silicon 44%
  • cavities 37%

• Soft mask-based dry etching of parylene AF4 for advanced packaging applications

  Bellaredj, M. L. F., Andrianov, N., Kaufhold, R. & Miskovic, G., 18 Jan 2023, p. 109. 113 p.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  • packaging 100%
  • masks 81%
  • etching 71%
  • photoresists 50%
  • argon 24%

• Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

  Terzic, T., Andrianov, N., Chouiki, M., Solonenko, D., De Pastina, A., Pashchenko, V. & Risquez, S., 2 Oct 2023, 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP).

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  Open Access

  • etching 100%
  • resonators 99%
  • scandium 84%
  • acoustics 76%
  • microelectromechanical systems 64%
• 2022

  Acoustofluidic Particle Focusing in PMMA Chips Using Low Frequency Lateral Resonances of The Piezoelectric Plate Transducer

  Fuchsluger, K., Ecker, K., De Pastina, A., Andrianov, N., Cselyuszka, N., Moridi, M. & Jakoby, B., 2022, 48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES) .

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • transducers 100%
  • chips 97%
  • low frequencies 86%
  • harmonics 84%
  • modes (standing waves) 49%

• A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding

  张俞骋, Solazzi, F., Cselyuszka, N., Sorschag, K., Andrianov, N., Bauscher, M., Schiffer, M., Lang, K-D., Moridi, M. & Schneider-Ramelow, M., 2022, Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS. p. 1 5 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • contamination 100%
  • sodium 99%
  • gases 57%
  • deviation 53%
  • resistors 38%

• Chemically enhanced dry etching of Al0.7Sc0.3N for MEMS applications

  Andrianov, N., De Pastina, A., Risquez, S. & Moridi, M., 21 Sept 2022.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  • microelectromechanical systems 100%
  • etching 77%
  • scandium 32%
  • temperature 15%
  • thin films 13%

• Fabrication of high-aspect-ratio α-Si pillar photonic crystalcoupled plasmonic waveguide for on-chip gas sensing

  Zhai, Y., Dubois, F., Dao, T. D., Spettel, J., Sasaki, T., Jannesari, R., Pühringer, G., Andrianov, N., Vojkuvka, L., Fleury, C., Consani, C., Stocker, G., Grille, T., Saeidi, P., Jakoby, B., Moridi, M. & Tortschanoff, A., 2022.

  Research output: Contribution to conference (No Proceedings) › Poster › peer-review

  • high aspect ratio 100%
  • chips 73%
  • photonics 64%
  • waveguides 62%
  • fabrication 56%

• High Performance Acoustofluidic Particle Focusing in Silicon-Based and Polymer-Based Devices Using Lateral Modes of Plate Transducers

  Fuchsluger, K., De Pastina, A., Cselyuszka, N., Andrianov, N., Roshanghias, A., Ecker, R., Mitteramskogler, K., Voglhuber-Brunnmaier, K., Moridi, M. & Jakoby, B., 20 Oct 2022.

  Research output: Contribution to conference (No Proceedings) › Abstract › peer-review

  • transducers 100%
  • polymers 71%
  • silicon 66%
  • performance 54%
  • actuation 51%

• Low-density SiOC thin films grown by low temperature plasma-enhanced chemical vapor deposition for high performance acoustic Bragg mirrors

  Pilz, J., Andrianov, N., Sinani, T., Azeem, S. M., Dao, T. D., Moridi, M. & Bruckner, G., 10 Nov 2022.

  Research output: Contribution to conference (No Proceedings) › Poster

• Novel Piezoelectric MOEMS Platform

  Lagosh, A., Zhai, Y., Risquez, S., De Pastina, A., Andrianov, N., Vojkuvka, L., Pribosek, J., Piot, A. & Moridi, M., 2022.

  Research output: Contribution to conference (No Proceedings) › Poster › peer-review

• ULTRA-FAST ACOUSTOFLUIDIC PARTICLE FOCUSING USING LATERAL MODES OF A PLATE TRANSDUCER

  Fuchsluger, A., De Pastina, A., Mitteramskogler, T., Ecker, R., Voglhuber-Brunnmaier, T., Andrianov, N., Shatalov, A., Cselyuszka, N., Moridi, M. & Jakoby, B., 2022, (Accepted/In press) Transducers 2023: The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems. Kyoto

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • transducers 100%
  • heat generation 72%
  • holders 68%
  • actuation 64%
  • flux density 49%

• Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips

  Fuchsluger, K., De Pastina, A., Nikolai, A., Roshanghias, A., Cselyuszka, N., Mitteramskogler, K., Ecker, K., Moridi, M. & Jakoby, B., 2022, Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips. p. 1 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  Open Access

  • transducers 100%
  • chips 97%
  • silicon 66%
  • heat generation 36%
  • holders 34%

• Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims: Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims

  Azeem, S. M., Spettel, J., Nikolai, A., Streque, J., Cassese, T., Pilz, J., Solonenko, D., Fleury, C., Dubois, F., Zhai, Y., Cselyuszka, N., Tortschanoff, A., Moridi, M. & Dao, T. D., 2022.

  Research output: Contribution to conference (No Proceedings) › Poster › peer-review

  • silicon oxides 100%
  • ellipsometry 92%
  • silicon nitrides 92%
  • nitrides 88%
  • vapor deposition 72%
• 2021

  Engineering mode coupling in a hybrid plasmon-photonic cavity for dual-band infrared spectroscopic gas sensing

  Dao, T. D., Dubois, F., Spettel, J., Tortschanoff, A., Fleury, C., Cselyuszka, N., Consani, C., Nikolai, A. & Moridi, M., 15 Jun 2021, In: OSA Continuum. 4, 6, p. 1827

  Research output: Contribution to journal › Article › peer-review

  Open Access

  File

  • Plasmons 100%
  • Photonics 65%
  • coupled modes 54%
  • Infrared radiation 49%
  • plasmons 46%
• 2018

  Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation

  Barsukov, Y. V., Volynets, V., Kobelev, A. A., Andrianov, N. A., Tulub, A. V. & Smirnov, A. S., Nov 2018, In: Journal of Vacuum Science & Technology A. 36, 6, p. 061301-1-061301-6 6 p.

  Research output: Contribution to journal › Article › peer-review

  • Quantum chemistry 100%
  • quantum chemistry 78%
  • Silicon nitride 76%
  • Quantum Chemistry 68%
  • Etching 67%

• Влияние энергии ионов при воздействии азотной плазмы на постоянные токи насыщения HEMT-транзисторов на основе нитридов III группы

  Translated title of the contribution: Influence of ion energy when exposed to nitrogen plasma on the constant saturation currents of HEMT transistors based on group III nitridesNikolai, A., 2018, In: Uspekhi Prikladnoi Fiziki. 5, p. 82-85 4 p.

  Research output: Contribution to journal › Article › peer-review

  File

  • nitrogen plasma 100%
  • high electron mobility transistors 81%
  • nitrides 73%
  • transistors 63%
  • saturation 55%

• Численное моделирование режимов обработки поверхности GaN в BCl3-плазме высокочастотного индукционного разряда

  Translated title of the contribution: Mechanisms of inductively coupled BCl3-plasma interaction with the GaN surfaceNikolai, A., 17 Aug 2018, In: Uspekhi Prikladnoi Fiziki. 6, 5, p. 381-388 7 p.

  Research output: Contribution to journal › Article › peer-review

  File

  • plasma interactions 100%
  • electric contacts 33%
  • polymers 33%
  • etching 28%
  • ions 26%
• 2017

  Influence of surface processing in a BCl3 plasma on the formation of ohmic contacts to AlGaN/GaN structures

  Andrianov, N. A., Kobelev, A. A., Smirnov, A. S., Barsukov, Y. V. & Zhukov, Y. M., 1 Mar 2017, In: Technical Physics. 62, 3, p. 436-440 5 p.

  Research output: Contribution to journal › Article › peer-review

  • electric contacts 100%
  • caps 40%
  • high electron mobility transistors 39%
  • nitrides 35%
  • field effect transistors 29%

• Исследование воздействия плазмы SF6 на поверхность НЕМТ-структур на основе GaN

  Translated title of the contribution: Study of SF6 plasma treatment of GaN-НЕМТ structuresNikolai, A., 17 May 2017, In: Uspekhi Prikladnoi Fiziki. 5, 4, p. 335-339 5 p.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  File

  • caps 100%
  • polarity 88%
  • high electron mobility transistors 48%
  • electrical faults 46%
  • valence 34%

• Многосеточные энергоанализаторы задерживающего потенциала для измерения функции распределения ионов по энергиям из плазмы высокочастотного емкостного разряда

  Nikolai, A., 2017, In: Uspekhi Prikladnoi Fiziki. 5, 6, p. 608-617 9 p.

  Research output: Contribution to journal › Article › peer-review

  File
• 2016

  Широкоформатные QWIP матрицы, фоточувствительные в спектральных диапазонах 8÷10 и 3÷5 мкм.

  Translated title of the contribution: Large format QWIP focal plane arrays operating in spectral ranges of 8÷10 and 3÷5 μmNikolai, A., 24 May 2016.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  File

  • quantum well infrared photodetectors 100%
  • focal plane devices 85%
  • format 72%
  • photosensitivity 58%
  • quantum wells 57%
• 2015

  Boron trichloride plasma treatment effect on ohmic contact resistance formed on GaN-based epitaxial structure

  Kobelev, A. A., Barsukov, Y. V., Andrianov, N. A. & Smirnov, A. S., 2015, p. 1-4. 4 p.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  Open Access

  • contact resistance 100%
  • chlorides 95%
  • boron 82%
  • caps 37%
  • etching 18%
• 2014

  BCl3 Plasma Treatment Effect on Ohmic Contact Resistance in GaN-Based High Electron Mobility Transistors

  Nikolai, A., 4 Jul 2014, p. 978-1-4799-5772-9/14. 2 p.

  Research output: Contribution to conference (No Proceedings) › Paper › peer-review

  Open Access

  • contact resistance 100%
  • high electron mobility transistors 98%
  • etching 36%
  • simulation 18%
• 2012

  анализатор потока и энергии заряженных частиц: анализатор потока и энергии заряженных частиц

  Translated title of the contribution: particle flux and energy analyzer: particle flux and energy analyzerAndrianov, N., 2012, Patent No. 119519, 20 Dec 2012

  Research output: Patent

  • Electrons 100%
  • Ions 91%
  • Fluxes 80%
  • Sensors 50%