Research output per year
Research output per year
Personal profile
Research interests
Junior Scientist in the Thin Film Technologies (TFT) unit at Silicon Austria Labs and Ph.D. candidate in Materials Science and Engineering at The Pennsylvania State University. My work focuses on the processing–structure–property relationships and reliability of PZT-based thin films for MEMS applications, including piezoelectric micromachined ultrasound transducers (pMUTs), adaptive optics, and microfluidic systems. I investigate degradation mechanisms under coupled processing and mechanical conditions to improve device stability and operational lifetime.
Education/Academic qualification
Master, Technical Chemistry, TU Wien
2019 → 2021
Bachelor, Technical Chemistry, TU Wien
2015 → 2019
External positions
Ph.D. Candidate
Jan 2022 → …
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Collaborations and top research areas from the last five years
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Effect of methane-hydrogen gas admixture on the selectivity toward platinum in dry etching of lead zirconate titanate (PZT) thin films by inductively coupled plasma reactive ion etching
Petschnigg, M., Andrianov, N., Azeem, S. M., Griesser, T., Wang, K., Shannon, S. C., Deluca, M. & Trolier-McKinstry, S., 12 Feb 2026, In: Journal of Vacuum Science & Technology A. 44Research output: Contribution to journal › Article › peer-review
Open Access -
Optimizing Out-of-Plane Displacement in Piezoelectric Micromachined Ultrasonic Transducers via Prestress Engineering in AlSc30%N
Abbaszadeh, J., De Pastina, A., Petschnigg, M., Piot, A., Smaliukas, P. & Shatalov, A., 2025, IEEE ISAF 2025.Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
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Low-temperature Adhesive Wafer Bonding for Film Layer Transfer
Rodrigues, A. D., Andrianov, N., Azeem, S. M., Petschnigg, M., Nguyen, T., Dao, T. D. & Roshanghias, A., 15 Oct 2024, 2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC) Proceedings. IEEEXploreResearch output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
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Actuation And Sensing For PZT Micromirrors Using d33 Mode Directional Interdigitated Electrodes
Thakkar, P., Lagosh, A., Petschnigg, M., Holzmann, D. & Pribosek, J., 1 Nov 2023, (Accepted/In press) IEEE SENSORS 2023.Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
Open AccessFile -
Spectroscopic ellipsometry study of parylene AF4
Solonenko, D., Petschnigg, M., Dao, T. D. & Miskovic, G., 4 Jul 2022, 2022 45th International Spring Seminar on Electronics Technology (ISSE).Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
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DC reliability of superlattice PZT thin films
Petschnigg, M. (Speaker), Yagi, R. (Contributor), Yamamoto, N. (Contributor), Kanno, I. (Contributor), Deluca, M. (Contributor) & Trolier-McKinstry, S. (Contributor)
4 Nov 2025Activity: Talk or presentation › Oral presentation
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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin Films by ICP-RIE
Petschnigg, M. (Speaker), Andrianov, N. (Speaker), Azeem, S. M. (Speaker), Griesser, T. (Speaker), Wang, K. (Speaker), Deluca, M. (Speaker) & Trolier-McKinstry, S. (Speaker)
14 Jul 2025Activity: Talk or presentation › Oral presentation
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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin Films by ICP-RIE
Petschnigg, M. (Speaker), Andrianov, N. (Speaker), Azeem, S. M. (Speaker), Griesser, T. (Speaker), Deluca, M. (Speaker) & Trolier-McKinstry, S. (Speaker)
3 Apr 2025Activity: Talk or presentation › Oral presentation
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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Petschnigg, M. (Speaker), Andrianov, N. (Speaker), Azeem, S. M. (Speaker), Deluca, M. (Speaker) & Trolier-McKinstry, S. (Speaker)
13 Nov 2024Activity: Talk or presentation › Poster Presentation
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Wafer Scale Deposition of Nb-Pb(ZrxTi1-x)O3 Thin-Films for MEMS Applications
Petschnigg, M. (Speaker), Bisht, R. S. (Speaker), Ghosh, A. (Speaker), Deluca, M. (Speaker), Röbisch, V. (Speaker), Kratzer, M. (Speaker) & Trolier-McKinstry, S. (Speaker)
11 Jun 2024Activity: Talk or presentation › Oral presentation
Thesis
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Dry Processing and Degradation Mechanisms of PZT Thin-Films for MEMS Applications
Petschnigg, M. (Author), Deluca, M. (Supervisor), Trolier-McKinstry, S. (Supervisor First) & Deluca, M. (Supervisor Second), 10 Jan 2022Student thesis: Doctoral Thesis