Projects per year
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Dive into the research topics where Piezoelectric Microsystem Technologies (PMT) is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
Collaborations and top research areas from the last five years
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Profiles
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Dr. Humberto Campanella Pineda
- Piezoelectric Microsystem Technologies (PMT) - Head of Research Unit, Principal Scientist
Person
Projects
- 2 Active
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MIRAC: Micro-electromechanical systems Integrated Active tunable Metasurface for spectrum reconstruction
Xu, T. (PI)
1/02/23 → 31/01/26
Project: Research
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Listen2Future: Acoustic transducer solutions integrated with digital technologies as key enablers for emerging applications fostering society 5.0
Xu, T. (PI) & Bourquard, C. (PI)
1/02/23 → 31/12/25
Project: Research
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Packaging-Induced Mode Distortions in Wideband Air-Coupled PMUT Arrays
Abbaszadeh, J., Rocha, R. T. & Shatalov, A., 2026, (Accepted/In press) IEEE MEMS 2026.Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
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2D PATTERN PROJECTION FOR MODE COUPLING ANALYSIS IN GIMBAL-LESS PIEZO-ACTUATED RESONANT SCANNING MICROMIRRORS
Piot, A., Rodrigues Palma Guerreiro, S., Rocha, R. T., Fleury, C., Sasaki, T., Lagosh, A., Travnik, A., Holzmann, D. & Bainschab, M., 2 Jul 2025, Proceedings of the 23rd International Conference on Solid-state Sensors, Actuators and Microsystems Transducers 2025: Transducers 2025.Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
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A HIGH-SENSITIVITY AIR-COUPLED PMUT WITH FORCE FEEDBACK CONTROL FOR FULL-LOOP RINGDOWN SUPPRESSION AND BANDWIDTH ENHANCEMENT
Xu, T., Caponi, D., Rocha, R. T., Da, Z. & Xu, C., 2025, Proceedings of the 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS2025): Transducers 2025.Research output: Conference proceeding/Chapter in Book › Conference Paper › peer-review
Prizes
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Finalist (Oral Presentation Category) for Outstanding Young Researcher Award (Transducers 2023)
Xu, T. (Recipient), 29 Jun 2023
Prize
File -
Particle Trapping in a Structured Microchannel Using Standing Acoustic Waves
Fuchsluger, A. (Recipient), De Pastina, A. (Recipient), Ecker, R. (Recipient), Mitteramskogler, T. (Recipient), Voglhuber-Brunnmaier, T. (Recipient), Andrianov, N. (Recipient), Cselyuszka, N. (Recipient) & Jakoby, B. (Recipient), Jun 2024
Prize
File
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Utilizing gas rarefaction to optimize preferential metal ion acceleration for epitaxial AlN growth on Silicon(111)
Behravan, N. (Speaker), Pitonakova, T. (Speaker), Terzic, T. (Speaker), Farhadizadeh, A. (Speaker), Deluca, M. (Speaker), Moridi, M. (Speaker), Solonenko, D. (Speaker) & Lundin, D. (Speaker)
22 Sept 2025 → 26 Sept 2025Activity: Talk or presentation › Poster Presentation
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Composition-graded Layer Enables Structural Defect Suppression and Ferroelectric Enhancement in Sc0.3Al0.7N Sputtered Thin Films
Nguyen, T. (Speaker), Dao, D. T. (Speaker), Miranda Mena, J. G. (Speaker), Nesterenko, I. (Speaker), Andrianov, N. (Speaker), Moridi, M. (Speaker) & Xu, T. (Speaker)
22 Sept 2025 → 26 Sept 2025Activity: Talk or presentation › Oral presentation
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High-Quality c-textured Sc0.36Al0.64N Thin Films on 200 mm Si wafers for Piezoelectric Applications
Nayak, S. K. (Speaker), Solonenko, D. (Speaker), Bisht, R. S. (Speaker), Nallagatla, V. R. (Speaker), Ghosh, A. (Speaker), Ali, W. R. (Speaker), Campanella Pineda, H. (Speaker), Kratzer, M. (Speaker), Henzen, D. (Speaker), Lazzari, C. M. (Speaker), Costantini, S. (Speaker), Picco, A. (Speaker), De Pastina, A. (Speaker) & Deluca, M. (Speaker)
13 Jul 2025 → 18 Jul 2025Activity: Talk or presentation › Poster Presentation
Student theses
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Inverse Optimization and Forward Simulation of Acoustic MEMS via Physics-informed and Data-driven Machine Learning
Xu, J. (Author), Xu, T. (Supervisor) & Schrag, G. (Supervisor First), 2023Student thesis: Doctoral Thesis
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Novel resonator concepts integrating epi-AlScN for high frequency RF filter and environmental applications
Terzic, T. (Author), Solonenko, D. (Supervisor) & Strittmatter, A. (Supervisor First), 2023Student thesis: Doctoral Thesis
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Air-coupled piezoelectric micromachined ultrasonic transducer based on multilayer AlScN
Namnabat, M. (Author), De Pastina, A. (Supervisor) & Villanueva, L. G. (Supervisor First), 2023Student thesis: Doctoral Thesis