RF-Sputter Deposition of Lead-based Perovskite Thin-Film Materials for MEMS Applications

Activity: Talk or presentation › Oral presentation

Period11 Jul 2022
Event titleÖGV Seminar 2022
Event typeSeminar
LocationLeoben, AustriaShow on map

Keywords

  • sputter deposition
  • PZT
  • thin-film
  • ferroelectric
  • piezoelectric
  • MEMS