Piezoelectric MEMS for acoustic and ultrasonic applications

Activity: Talk or presentationInvited talk

Period30 Jun 2022
Event title2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF): 2022 ISAF-PFM-ECAPD Joint Conference
Event typeConference
LocationTours, FranceShow on map
Degree of RecognitionInternational

Keywords

  • Piezoelectric microelectromechanical systems (PiezoMEMS)
  • piezoelectric microphone
  • piezoelectric micromachined ultrasonic transducer (PMUT)
  • piezoelectric thin films
  • lead zirconate titanate (PZT)