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Piezoelectric MEMS for acoustic and ultrasonic applications
Lixiang Wu (Speaker)
Piezoelectric Microsystem Technologies (PMT)
Activity
:
Talk or presentation
›
Invited talk
Period
30 Jun 2022
Event title
2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF): 2022 ISAF-PFM-ECAPD Joint Conference
Event type
Conference
Location
Tours, France
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Degree of Recognition
International
Keywords
Piezoelectric microelectromechanical systems (PiezoMEMS)
piezoelectric microphone
piezoelectric micromachined ultrasonic transducer (PMUT)
piezoelectric thin films
lead zirconate titanate (PZT)
Related content
Projects
ASSIC - Project 1.5 MEMS Microfabrication Technology
Project
:
Research