MOEMS characterization insights : the specific case of scanning micromirrors

Activity: Talk or presentation › Invited talk

Description

The talk describe the different challenges and techniques to use for the characterization of micromirrors, from the frequency response to the optical aberrations and reliability issues.
Period3 Jun 2025
Event titleDesign, Test, Integration & Packaging of MEMS/MOEMS - 2025
Event typeConference
LocationSplit, CroatiaShow on map
Degree of RecognitionInternational

Keywords

  • MEMS mirror
  • validation
  • dynamic deformation
  • micromirror

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