@conference{99f41d539dbe415eaa8c60cd59f1fee4,
title = "Sensitivity optimization of an evanescent field particle detector based on a silicon nitride waveguide",
author = "Anton Buchberger and Paul Maierhofer and Jochen Kraft and Marcus Baumgart and Alexander Bergmann",
year = "2020",
month = aug,
day = "21",
doi = "10.1117/12.2566906",
language = "English",
pages = "89",
note = "Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII ; Conference date: 24-08-2020 Through 28-08-2020",
}