Position encoding and phase control of resonant MOEMS mirrors

A. Tortschanoff; M. Lenzhofer; A. Frank; M. Wildenhain; T. Sandner; H. Schenk; W. Scherf; A. Kenda

doi:10.1016/j.sna.2010.01.011

Position encoding and phase control of resonant MOEMS mirrors

A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, W. Scherf, A. Kenda

Publikation: Konferenzbeitrag › Papier › Begutachtung

Abstract

Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a major challenge for electrostatically driven MOEMS mirrors. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics with closed loop control, which ensures operation close to the mirror resonance. Closed loop control is realised by adjusting the driving frequency to minimize the phase offset of the mirror oscillation, which is notably applicable for high frequency devices. Here we present our position encoding and feedback scheme, and show first experimental results, which demonstrate the capability of our device. © 2010 Elsevier B.V. All rights reserved.

Originalsprache	Englisch
Seitenumfang	6
DOIs	https://doi.org/10.1016/j.sna.2010.01.011
Publikationsstatus	Veröffentlicht - Aug. 2010

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10.1016/j.sna.2010.01.011

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@conference{46170a43b04c4935979e517eab99a99f,

title = "Position encoding and phase control of resonant MOEMS mirrors",

abstract = "Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a major challenge for electrostatically driven MOEMS mirrors. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics with closed loop control, which ensures operation close to the mirror resonance. Closed loop control is realised by adjusting the driving frequency to minimize the phase offset of the mirror oscillation, which is notably applicable for high frequency devices. Here we present our position encoding and feedback scheme, and show first experimental results, which demonstrate the capability of our device. {\textcopyright} 2010 Elsevier B.V. All rights reserved.",

keywords = "Closed loop control, MOEMS, Scanner mirrors",

author = "A. Tortschanoff and M. Lenzhofer and A. Frank and M. Wildenhain and T. Sandner and H. Schenk and W. Scherf and A. Kenda",

year = "2010",

month = aug,

doi = "10.1016/j.sna.2010.01.011",

language = "English",

}

TY - CONF

T1 - Position encoding and phase control of resonant MOEMS mirrors

AU - Tortschanoff, A.

AU - Lenzhofer, M.

AU - Frank, A.

AU - Wildenhain, M.

AU - Sandner, T.

AU - Schenk, H.

AU - Scherf, W.

AU - Kenda, A.

PY - 2010/8

Y1 - 2010/8

N2 - Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a major challenge for electrostatically driven MOEMS mirrors. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics with closed loop control, which ensures operation close to the mirror resonance. Closed loop control is realised by adjusting the driving frequency to minimize the phase offset of the mirror oscillation, which is notably applicable for high frequency devices. Here we present our position encoding and feedback scheme, and show first experimental results, which demonstrate the capability of our device. © 2010 Elsevier B.V. All rights reserved.

AB - Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a major challenge for electrostatically driven MOEMS mirrors. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics with closed loop control, which ensures operation close to the mirror resonance. Closed loop control is realised by adjusting the driving frequency to minimize the phase offset of the mirror oscillation, which is notably applicable for high frequency devices. Here we present our position encoding and feedback scheme, and show first experimental results, which demonstrate the capability of our device. © 2010 Elsevier B.V. All rights reserved.

KW - Closed loop control

KW - MOEMS

KW - Scanner mirrors

UR - https://www.mendeley.com/catalogue/987acca4-c1a7-3320-a266-f3a92379d6fd/

U2 - 10.1016/j.sna.2010.01.011

DO - 10.1016/j.sna.2010.01.011

M3 - Paper

ER -

Position encoding and phase control of resonant MOEMS mirrors

Abstract

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