Optical surfacing via linear ion source

Lixiang Wu

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Fachzeitschrift	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOIs	https://doi.org/10.1016/j.nimb.2017.03.005
Publikationsstatus	Veröffentlicht - 2017
Extern publiziert	Ja

Zugriff auf Dokument

TY - JOUR

T1 - Optical surfacing via linear ion source

AU - Wu, Lixiang

PY - 2017

Y1 - 2017

U2 - 10.1016/j.nimb.2017.03.005

DO - 10.1016/j.nimb.2017.03.005

M3 - Article

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -