Abstract
In this work, a sensor based on a plasmonic slot waveguide (PSWG) is
numerically designed and investigated. The sensor consists of a gold PSWG
on a silicon oxide substrate which is coated with a thin silicon nitride layer.
The waveguide was optimized using COMSOL Multiphysics based on the
finite element method for a wavelength of 4.26 µm. This wavelength
corresponds to the center of the mid-infrared absorption lines of CO2 gas
representing a typical sensing application. A figure of merit (FOM), which is
given by a product of confinement factor and propagation length, i.e. two
crucial parameters for sensing applications, was calculated. To characterize
the propagation length, the imaginary part of the effective mode index of a
guided mode is considered, resulting in a dimensionless FOM. The best FOM
for the optimized parameters is 70.1.
numerically designed and investigated. The sensor consists of a gold PSWG
on a silicon oxide substrate which is coated with a thin silicon nitride layer.
The waveguide was optimized using COMSOL Multiphysics based on the
finite element method for a wavelength of 4.26 µm. This wavelength
corresponds to the center of the mid-infrared absorption lines of CO2 gas
representing a typical sensing application. A figure of merit (FOM), which is
given by a product of confinement factor and propagation length, i.e. two
crucial parameters for sensing applications, was calculated. To characterize
the propagation length, the imaginary part of the effective mode index of a
guided mode is considered, resulting in a dimensionless FOM. The best FOM
for the optimized parameters is 70.1.
Originalsprache | Englisch |
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Publikationsstatus | Veröffentlicht - 1 Juni 2022 |
Veranstaltung | Microelectronic System Symposium - Hasu der Ingenieure, Eschenbachgasse 9, Vienna, Österreich Dauer: 1 Juni 2022 → 2 Juni 2022 http://www.mess.co.at/ |
Konferenz
Konferenz | Microelectronic System Symposium |
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Kurztitel | MESS22 |
Land/Gebiet | Österreich |
Ort | Vienna |
Zeitraum | 1/06/22 → 2/06/22 |
Internetadresse |