MOEMS Translatory Actuator Characterisation, Position Encoding and Closed-Loop Control

Martin Lenzhofer, Andreas Tortschanoff, Albert Frank, T. Sandner, H. Schenk, Martin Kraft, Andreas Kenda

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

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@article{82f5866315a644be91c1b5dd04300ae3,

title = "MOEMS Translatory Actuator Characterisation, Position Encoding and Closed-Loop Control",

author = "Martin Lenzhofer and Andreas Tortschanoff and Albert Frank and T. Sandner and H. Schenk and Martin Kraft and Andreas Kenda",

year = "2010",

language = "English",

volume = "2010",

pages = "901 -- 907",

number = "16(5)",

}

TY - JOUR

T1 - MOEMS Translatory Actuator Characterisation, Position Encoding and Closed-Loop Control

AU - Lenzhofer, Martin

AU - Tortschanoff, Andreas

AU - Frank, Albert

AU - Sandner, T.

AU - Schenk, H.

AU - Kraft, Martin

AU - Kenda, Andreas

PY - 2010

Y1 - 2010

M3 - Article

SN - 0946-7076

VL - 2010

SP - 901

EP - 907

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 16(5)

ER -