Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000°C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600°C. The devices showed promising results up to 450°C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.
|Seiten (von - bis)||85-93|
|Fachzeitschrift||Journal of Sensors and Sensor Systems|
|Publikationsstatus||Veröffentlicht - 17 März 2016|