Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Jochen Bardong, Alfred Binder, Sasa Toskov, Goran Miskovic, Goran Radosavljevic

    Publikation: Beitrag in FachzeitschriftArtikelBegutachtung

    Abstract

    Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000°C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600°C. The devices showed promising results up to 450°C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.
    OriginalspracheEnglisch
    Seiten (von - bis)85-93
    Seitenumfang9
    FachzeitschriftJournal of Sensors and Sensor Systems
    Jahrgang5
    Ausgabenummer1
    DOIs
    PublikationsstatusVeröffentlicht - 17 März 2016

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