Investigation of charge carrier dynamics in silicon wafers using terahertz imaging spectroscopy

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	Englisch
Titel	2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings
DOIs	https://doi.org/10.1109/I2MTC.2012.6229574
Publikationsstatus	Veröffentlicht - 2012

Zugriff auf Dokument

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title = "Investigation of charge carrier dynamics in silicon wafers using terahertz imaging spectroscopy",

author = "T. Arnold and {De Biasio}, M. and W. M{\"u}hleisen and R. Leitner",

year = "2012",

doi = "10.1109/I2MTC.2012.6229574",

language = "English",

booktitle = "2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings",

}

TY - GEN

T1 - Investigation of charge carrier dynamics in silicon wafers using terahertz imaging spectroscopy

AU - Arnold, T.

AU - De Biasio, M.

AU - Mühleisen, W.

AU - Leitner, R.

PY - 2012

Y1 - 2012

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U2 - 10.1109/I2MTC.2012.6229574

DO - 10.1109/I2MTC.2012.6229574

M3 - Conference Paper

BT - 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings

ER -