Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films

Vladimir Pashchenko, Fazel Parsapour, Hugo Chambon, Pascal Nicolay, Ingo Bleyl, Ulrike Rösler, Paul Muralt

Publikation: Konferenzbeitrag › Poster › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 14 Juli 2019
Veranstaltung	International Workshop on PiezoMEMS - Lausanne, Schweiz Dauer: 14 Juli 2019 → 19 Juli 2019 https://lausanne2019.org/

Workshop	International Workshop on PiezoMEMS
Kurztitel	PiezoMEMS
Land/Gebiet	Schweiz
Ort	Lausanne
Zeitraum	14/07/19 → 19/07/19
Internetadresse	https://lausanne2019.org/

Dieses zitieren

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title = "Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films",

author = "Vladimir Pashchenko and Fazel Parsapour and Hugo Chambon and Pascal Nicolay and Ingo Bleyl and Ulrike R{\"o}sler and Paul Muralt",

year = "2019",

month = jul,

day = "14",

language = "English",

note = "International Workshop on PiezoMEMS, PiezoMEMS ; Conference date: 14-07-2019 Through 19-07-2019",

url = "https://lausanne2019.org/",

}

TY - CONF

T1 - Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films

AU - Pashchenko, Vladimir

AU - Parsapour, Fazel

AU - Chambon, Hugo

AU - Nicolay, Pascal

AU - Bleyl, Ingo

AU - Rösler, Ulrike

AU - Muralt, Paul

PY - 2019/7/14

Y1 - 2019/7/14

M3 - Poster

T2 - International Workshop on PiezoMEMS

Y2 - 14 July 2019 through 19 July 2019

ER -