Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film

Y. Fujita, T. Sasaki, K. Fukuda, N.T. Tung, T. Hashida, K. Hane

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	Englisch
Titel	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495545
Publikationsstatus	Veröffentlicht - 2021
Extern publiziert	Ja

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@inproceedings{0d6a2887d93e4171b72ed8812c31c1a9,

title = "Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film",

author = "Y. Fujita and T. Sasaki and K. Fukuda and N.T. Tung and T. Hashida and K. Hane",

year = "2021",

doi = "10.1109/Transducers50396.2021.9495545",

language = "English",

booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

}

TY - GEN

T1 - Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film

AU - Fujita, Y.

AU - Sasaki, T.

AU - Fukuda, K.

AU - Tung, N.T.

AU - Hashida, T.

AU - Hane, K.

PY - 2021

Y1 - 2021

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85114963967&partnerID=MN8TOARS

U2 - 10.1109/Transducers50396.2021.9495545

DO - 10.1109/Transducers50396.2021.9495545

M3 - Conference Paper

BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

ER -