TY - JOUR
T1 - Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer
AU - Xu, Tingzhong
AU - Zhao, Libo
AU - Jiang, Zhuangde
AU - Guo, Shuaishuai
AU - Li, Zhikang
AU - Yang, Ping
AU - Luo, Guoxi
AU - Sun, Lin
AU - Zhang, Liangchi
PY - 2020/10/1
Y1 - 2020/10/1
N2 - This article presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and Helmholtz resonant (HR) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are developed for structural optimization and complex array design. The model-derived results agree well with the FEM results. On the basis of the proposed models, an optimized design is established to achieve high output pressure and a good array working performance. The working performance of arrays that consist of HR-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs) is compared. Results indicate that the HR-PMUT array has a lower crosstalk effect than the traditional C-PMUT array. Furthermore, the highest ultrasonic output pressure of HR-PMUT array at the resonant frequency can be achieved with an increase of up to 163% compared with that of the C-PMUT array because of the liquid amplification effect. Also, the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.
AB - This article presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and Helmholtz resonant (HR) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are developed for structural optimization and complex array design. The model-derived results agree well with the FEM results. On the basis of the proposed models, an optimized design is established to achieve high output pressure and a good array working performance. The working performance of arrays that consist of HR-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs) is compared. Results indicate that the HR-PMUT array has a lower crosstalk effect than the traditional C-PMUT array. Furthermore, the highest ultrasonic output pressure of HR-PMUT array at the resonant frequency can be achieved with an increase of up to 163% compared with that of the C-PMUT array because of the liquid amplification effect. Also, the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.
KW - Array
KW - high emission performance
KW - liquid amplification effect
KW - piezoelectric micromachined ultrasonic transducers (PMUTs)
KW - resonant cavity
UR - https://www.mendeley.com/catalogue/3cd256c7-8d33-3c7a-a54c-5e4832fc9dcc/
U2 - 10.1109/TUFFC.2020.2993805
DO - 10.1109/TUFFC.2020.2993805
M3 - Article
C2 - 32396085
SN - 1525-8955
VL - 67
SP - 2103
EP - 2118
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 10
ER -