Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Adrien Piot; Jaka Pribošek; Mohssen Moridi

doi:10.1109/MEMS51782.2021.9375326

Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Adrien Piot, Jaka Pribošek, Mohssen Moridi

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Abstract

In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.

Originalsprache	Englisch
Titel	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Seiten	89-92
Seitenumfang	4
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375326
Publikationsstatus	Veröffentlicht - 29 Jän. 2021
Veranstaltung	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA Dauer: 25 Jän. 2021 → 29 Jän. 2021

Konferenz

Konferenz	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Zeitraum	25/01/21 → 29/01/21

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10.1109/MEMS51782.2021.9375326

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9375326

Andere Dateien und Links

https://ieeexplore.ieee.org/document/9375326/

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@inproceedings{60f6b251f5bb4f85b484f2658a6be696,

title = "Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT",

abstract = "In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.",

keywords = "Micromechanical devices, Resonant frequency, Optical variables measurement, Laser modes, Pulsed laser deposition, Laser excitation, Mirrors",

author = "Adrien Piot and Jaka Pribo{\v s}ek and Mohssen Moridi",

year = "2021",

month = jan,

day = "29",

doi = "10.1109/MEMS51782.2021.9375326",

language = "English",

isbn = "978-1-6654-3024-1",

pages = "89--92",

booktitle = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 25-01-2021 Through 29-01-2021",

}

Piot, A, Pribošek, J & Moridi, M 2021, Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT. in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)., 9375326, S. 89-92, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375326

TY - GEN

T1 - Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

AU - Piot, Adrien

AU - Pribošek, Jaka

AU - Moridi, Mohssen

PY - 2021/1/29

Y1 - 2021/1/29

N2 - In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.

AB - In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.

KW - Micromechanical devices

KW - Resonant frequency

KW - Optical variables measurement

KW - Laser modes

KW - Pulsed laser deposition

KW - Laser excitation

KW - Mirrors

UR - https://ieeexplore.ieee.org/document/9375326/

U2 - 10.1109/MEMS51782.2021.9375326

DO - 10.1109/MEMS51782.2021.9375326

M3 - Conference Paper

SN - 978-1-6654-3024-1

SP - 89

EP - 92

BT - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 25 January 2021 through 29 January 2021

ER -

Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Abstract

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