Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Adrien Piot, Jaka Pribošek, Mohssen Moridi

    Publikation: Konferenzband/Beitrag in Buch/BerichtKonferenzartikelBegutachtung

    Abstract

    In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.
    OriginalspracheEnglisch
    Titel2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
    Seiten89-92
    Seitenumfang4
    DOIs
    PublikationsstatusVeröffentlicht - 29 Jän. 2021
    Veranstaltung2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA
    Dauer: 25 Jän. 202129 Jän. 2021

    Konferenz

    Konferenz2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
    Zeitraum25/01/2129/01/21

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