Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

A. Kenda, M. Kraft, A. Tortschanoff, W. Scherf, T. Sandner, H. Schenk, S. Luettjohann, A. Simon

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	undefiniert/unbekannt
Titel	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2053347
Publikationsstatus	Veröffentlicht - 2014

Zugriff auf Dokument

@inproceedings{29bf595b9dac4eb787651a78cae88769,

title = "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives",

author = "A. Kenda and M. Kraft and A. Tortschanoff and W. Scherf and T. Sandner and H. Schenk and S. Luettjohann and A. Simon",

year = "2014",

doi = "10.1117/12.2053347",

language = "undefiniert/unbekannt",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

AU - Kenda, A.

AU - Kraft, M.

AU - Tortschanoff, A.

AU - Scherf, W.

AU - Sandner, T.

AU - Schenk, H.

AU - Luettjohann, S.

AU - Simon, A.

PY - 2014

Y1 - 2014

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84904735884&partnerID=MN8TOARS

U2 - 10.1117/12.2053347

DO - 10.1117/12.2053347

M3 - Konferenzartikel

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -