Detection and identification of foreign bodies in polymer parts for use in semiconductor manufacturing

T. Arnold; S. Meislitzer; T. Moldaschl; M. De Biasio; L. Neumaier; R. Leitner; B. Ottersböck; G. Oreski; M. Kraft; C. Hirschl

doi:10.1117/12.2262617

Detection and identification of foreign bodies in polymer parts for use in semiconductor manufacturing

T. Arnold, S. Meislitzer, T. Moldaschl, M. De Biasio, L. Neumaier, R. Leitner, B. Ottersböck, G. Oreski, M. Kraft, C. Hirschl

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	Englisch
Titel	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2262617
Publikationsstatus	Veröffentlicht - 2017

Zugriff auf Dokument

10.1117/12.2262617

Andere Dateien und Links

http://www.scopus.com/inward/record.url?eid=2-s2.0-85029692792&partnerID=MN8TOARS

Dieses zitieren

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title = "Detection and identification of foreign bodies in polymer parts for use in semiconductor manufacturing",

author = "T. Arnold and S. Meislitzer and T. Moldaschl and {De Biasio}, M. and L. Neumaier and R. Leitner and B. Ottersb{\"o}ck and G. Oreski and M. Kraft and C. Hirschl",

year = "2017",

doi = "10.1117/12.2262617",

language = "English",

isbn = "1996756X 0277786X",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - GEN

T1 - Detection and identification of foreign bodies in polymer parts for use in semiconductor manufacturing

AU - Arnold, T.

AU - Meislitzer, S.

AU - Moldaschl, T.

AU - De Biasio, M.

AU - Neumaier, L.

AU - Leitner, R.

AU - Ottersböck, B.

AU - Oreski, G.

AU - Kraft, M.

AU - Hirschl, C.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85029692792&partnerID=MN8TOARS

U2 - 10.1117/12.2262617

DO - 10.1117/12.2262617

M3 - Conference Paper

SN - 1996756X 0277786X

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -