Deposition and patterning of electrodes on the vertical sidewalls of deep trenches

L Bonnin, A Piot, N Isac, A Bosseboeuf

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	105014
Fachzeitschrift	Journal of Micromechanics and Microengineering
Jahrgang	30
Ausgabenummer	10
DOIs	https://doi.org/10.1088/1361-6439/aba377
Publikationsstatus	Veröffentlicht - 1 Okt. 2020

Zugriff auf Dokument

@article{2a94a1d6616849d49bb2e9ab7f5d7f6f,

title = "Deposition and patterning of electrodes on the vertical sidewalls of deep trenches",

author = "L Bonnin and A Piot and N Isac and A Bosseboeuf",

year = "2020",

month = oct,

day = "1",

doi = "10.1088/1361-6439/aba377",

language = "English",

volume = "30",

pages = "105014",

number = "10",

}

TY - JOUR

T1 - Deposition and patterning of electrodes on the vertical sidewalls of deep trenches

AU - Bonnin, L

AU - Piot, A

AU - Isac, N

AU - Bosseboeuf, A

PY - 2020/10/1

Y1 - 2020/10/1

U2 - 10.1088/1361-6439/aba377

DO - 10.1088/1361-6439/aba377

M3 - Article

SN - 1361-6439

VL - 30

SP - 105014

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 10

ER -