Computationally efficient model for viscous damping in perforated MEMS structures

TY - JOUR

T1 - Computationally efficient model for viscous damping in perforated MEMS structures

AU - Kaczynski, J.

AU - Ranacher, C.

AU - Fleury, C.

PY - 2020

Y1 - 2020

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85089697957&partnerID=MN8TOARS

U2 - 10.1016/j.sna.2020.112201

DO - 10.1016/j.sna.2020.112201

M3 - Article

SN - 0924-4247

VL - 2020

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 112201

ER -