Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, A. Kenda

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	Englisch
Titel	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.886481
Publikationsstatus	Veröffentlicht - 2011

Zugriff auf Dokument

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title = "Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes",

author = "A. Tortschanoff and A. Frank and M. Lenzhofer and M. Wildenhain and T. Sandner and A. Kenda",

year = "2011",

doi = "10.1117/12.886481",

language = "English",

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T1 - Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

AU - Tortschanoff, A.

AU - Frank, A.

AU - Lenzhofer, M.

AU - Wildenhain, M.

AU - Sandner, T.

AU - Kenda, A.

PY - 2011

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BT - Proceedings of SPIE - The International Society for Optical Engineering

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