ARBITRARY SHAPED BACKSIDE REINFORCEMENT FOR TWO DIMENSIONAL RESONANT MICROMIRRORS

Takashi Sasaki; Adrien Piot; Anton Lagosh; Clément Fleury; Markus Bainschab; Yanfen Zhai; Marcus Baumgart; Sara Rodrigues Palma Guerreiro; Dominik Holzmann; Ales Travnik; Mohssen Moridi

ARBITRARY SHAPED BACKSIDE REINFORCEMENT FOR TWO DIMENSIONAL RESONANT MICROMIRRORS

Takashi Sasaki, Adrien Piot, Anton Lagosh, Clément Fleury, Markus Bainschab, Yanfen Zhai, Marcus Baumgart, Sara Rodrigues Palma Guerreiro, Dominik Holzmann, Ales Travnik, Mohssen Moridi

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	Englisch
Titel	IEEE MEMS 2023
Seiten	1107
Seitenumfang	4
Publikationsstatus	Veröffentlicht - 2 Jän. 2023

Dieses zitieren

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title = "ARBITRARY SHAPED BACKSIDE REINFORCEMENT FOR TWO DIMENSIONAL RESONANT MICROMIRRORS",

author = "Takashi Sasaki and Adrien Piot and Anton Lagosh and Cl{\'e}ment Fleury and Markus Bainschab and Yanfen Zhai and Marcus Baumgart and {Rodrigues Palma Guerreiro}, Sara and Dominik Holzmann and Ales Travnik and Mohssen Moridi",

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AU - Sasaki, Takashi

AU - Piot, Adrien

AU - Lagosh, Anton

AU - Fleury, Clément

AU - Bainschab, Markus

AU - Zhai, Yanfen

AU - Baumgart, Marcus

AU - Rodrigues Palma Guerreiro, Sara

AU - Holzmann, Dominik

AU - Travnik, Ales

AU - Moridi, Mohssen

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Y1 - 2023/1/2

M3 - Conference Paper

SP - 1107

BT - IEEE MEMS 2023

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