Abstract
The invention discloses a kind of multi-function membrane high sensitivity CMUTs gas sensors and preparation method thereof, the present invention uses graphene, molybdenum disulfide and MXenes (two-dimentional transition metal carbide or nitride) etc. have high elastic modulus simultaneously, vapor sensitivity and the multifunctional material of electric conductivity are as CMUTs sensing element, i.e. single layer free standing structure film is used as CMUTs vibration film simultaneously, top electrode and sensitive material, realize vibration film, the integrated design of the multi-layer compound films such as top electrode and sensitive material, film quality can be effectively reduced, improve unit consistency and resonance frequency, and then it can realize greatly improving for the comprehensive performances such as CMUTs gas sensor detectable limit and detection sensitivity.
| Titel in Übersetzung | A kind of multi-function membrane high sensitivity CMUTs gas sensor and preparation method |
|---|---|
| Originalsprache | Chinesisch (vereinfacht) |
| Veröffentlichungsnummer | CN110398536A |
| Publikationsstatus | Veröffentlicht - 2019 |