一种多参数高选择性CMUTs气体传感器及其使用与制备方法

Zhikang Li (Erfinder/-in), Libo Zhao (Erfinder/-in), Yihe Zhao (Erfinder/-in), Jie Li (Erfinder/-in), Tingzhong Xu (Erfinder/-in), Shuaishuai Guo (Erfinder/-in), Zichen Liu (Erfinder/-in), Guoxi Luo (Erfinder/-in), Lei Li (Erfinder/-in), shubei wang (Erfinder/-in), Zhuangde Jiang (Erfinder/-in)

    Publikation: SchutzrechtPatent

    Abstract

    The invention discloses a kind of highly selective CMUTs gas sensor of multi-parameter and its use and preparation method, the present invention uses SnO2、ZnO、Fe2O3、WO3Equal metal oxide semiconductors, it is used as to CMUTs top electrode and sensitive identification material simultaneously, using the characteristic of film quality and top electrode resistance variations is caused after its adsorbed gas simultaneously, realize that physics, chemical property is close or the highly selective sensitivity of similar gases molecule.The variation of film quality can cause the variation of CMUT resonance frequency;The variation for powering on electrode resistance can cause the variation of alternating voltage amplitude between CMUT upper/lower electrode, and then cause the variation of CMUT vibration of thin membrane amplitude, pass through the highly selective detection for changing achievable gas molecule of both output parameters of resonance frequency and vibration of thin membrane displacement amplitude.Further, since conductor oxidate sensitive material has a reusability under temperature adjusting, therefore CMUT gas sensor of the present invention is in addition to also having good repeated with highly selective outer.
    Titel in ÜbersetzungA kind of highly selective CMUTs gas sensor of multi-parameter and its use and preparation method
    OriginalspracheChinesisch (vereinfacht)
    VeröffentlichungsnummerCN110361445A
    PublikationsstatusVeröffentlicht - 2019

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