Physik & Astronomy
resonators
100%
thin films
92%
acoustics
58%
scandium
38%
transducers
37%
temperature sensors
30%
seeds
29%
microelectromechanical systems
29%
Q factors
26%
sapphire
24%
nitrides
23%
acoustic excitation
18%
wurtzite
18%
etching
18%
filters
16%
Lamb waves
16%
Rayleigh waves
16%
wave excitation
16%
acoustic properties
16%
reflectors
15%
aluminum
14%
shear
14%
aluminum nitrides
13%
temperature measurement
12%
crystallites
12%
nucleation
11%
acoustic delay lines
11%
wave propagation
11%
performance
11%
fabrication
11%
vacuum
10%
microstructure
10%
sputtering
10%
epitaxy
10%
grain boundaries
10%
pistons
9%
coupling coefficients
9%
film thickness
9%
stiffness matrix
9%
electrodes
9%
simulation
8%
thermistors
8%
impedance matching
8%
oxides
8%
strontium titanates
8%
piezoelectricity
8%
acoustic impedance
8%
flat surfaces
8%
electric fields
8%
wall temperature
8%
Ingenieurwesen & Materialwissenschaft
Resonators
30%
Near field communication
29%
Thin films
26%
Ultrasonic transducers
24%
Transducers
22%
Acoustic waves
21%
Plate metal
18%
Metals
17%
Parameter extraction
17%
Accelerometers
17%
Surface waves
15%
Pressure sensors
14%
Microphones
14%
MEMS
12%
Lead zirconate titanate
12%
Ultrasonics
11%
Film growth
10%
Pipe
10%
Yttrium
10%
Carrier concentration
9%
Microstructure
9%
Data communication systems
9%
Communication
9%
Atomic force microscopy
8%
Transponders
8%
Nitrides
8%
Nanoindentation
8%
Antennas
8%
Fabrication
7%
Seed
7%
Transmission electron microscopy
7%
Permittivity
6%
X ray diffraction
6%
Multilayers
6%
Impurities
6%
Acoustic wave velocity
6%
Elastic constants
6%
Elastic moduli
5%
Acoustics
5%
Oxygen
5%
Scanning electron microscopy
5%
Single crystals
5%
Curve fitting
5%
