Publikationen pro Jahr
Publikationen pro Jahr
- 50 Ergebnisse
Suchergebnisse
-
2024
Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function
Sasaki, T., Piot, A., Fleury, C., Rodrigues Palma Guerreiro, S., Rocha, R. T. & Lagosh, A., 22 Jän. 2024, 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS).Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2023
A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE
Nguyen, T. T., Sasaki, T., Greif, D., Smyth, K., Lamansky, S. & Kazuhiro, H., Juni 2023, A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE. S. T4P.056Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
ARBITRARY SHAPED BACKSIDE REINFORCEMENT FOR TWO DIMENSIONAL RESONANT MICROMIRRORS
Sasaki, T., Piot, A., Lagosh, A., Fleury, C., Bainschab, M., Zhai, Y., Baumgart, M., Rodrigues Palma Guerreiro, S., Holzmann, D., Travnik, A. & Moridi, M., 2 Jän. 2023, IEEE MEMS 2023. S. 1107 4 S.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Micromachined optical scanner using acoustic radiation force
Sasaki, T., Takahashi, Y. & Hane, K., Juli 2023, Micromachined optical scanner using acoustic radiation force. S. TS-TUE-02-03Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION
Bainschab, M., Tumolin Rocha, R., Fleury, C., Sasaki, T., Rodrigues Palma Guerreiro, S., Lagosh, A. & Piot, A., Juni 2023, MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION. S. W4P.007Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses
Zhai, Y., Sasaki, T., Moridi, M., Lin, R., Alnakhli, Z., Shamim, A., Li, X., Younis, M., Hane, K. & Wu, L., 2023, SPIE. S. 12379 - 12382 4 S.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung
-
PIEZOELECTRICALLY ACTUATED MICROMIRROR WITH DYNAMIC DEFORMATION COMPENSATION MECHANISM
Sasaki, T., Piot, A., Pribosek, J., Lagosh, A., Fleury, C., Bainschab, M., Zhai, Y., Baumgart, M., Rodrigues Palma Guerreiro, S., Holzmann, D., Travnik, A. & Moridi, M., 2 Jän. 2023, IEEE MEMS 2023. S. 1123 4 S.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
RESONANT d33 MODE PZT MEMS MIRROR EXCITED WITH DIRECTIONAL INTERDIGITATED ELECTRODES
Thakkar, P., Lagosh, A., Sasaki, T., Bainschab, M. & Pribosek, J., 2 Jän. 2023, IEEE MEMS 2023. S. 1127 4 S.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Resonant Piezoelectric Varifocal Mirror with on-Chip Integrated Diffractive Optics for Increased Frequency Response
Pribosek, J., Lagosh, A., Thakkar, P., Sasaki, T. & Bainschab, M., 1 März 2023, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung
-
2022
Measuring angle-resolved dynamic deformation of micromirrors with digital stroboscopic holography
Thakkar, P., Fleury, C., Bainschab, M., Sasaki, T., Zauner, M., Holzmann, D., Piot, A. & Pribosek, J., 20 Mai 2022, Optics and Photonics for Advanced Dimensional Metrology II. Band 12137 . S. 112-119Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
On-chip integrated lateral and vertical tunable metasurfaces for 3D imaging
Zhai, Y., Sasaki, T., Moridi, M., Lin, R., Alnakhli, Z., Wu, L., Shamim, A., Li, X., Younis, M. & Hane, K., 2022, MNE-ES2022 .Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung
-
2021
Acoustically Levitated Spinning Optical Scanner
Sasaki, T. & Hane, K., 2021, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film
Fujita, Y., Sasaki, T., Fukuda, K., Tung, N. T., Hashida, T. & Hane, K., 2021, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2020
Motion nonlinearity of gimbaled micromirror in omnidirectional scanning for LiDAR application∗
Suzuki, K., Sasaki, T. & Hane, K., 2020, 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2019
Cycloidal scanning with MEMS micro mirror for an omnidirectional long range LiDAR
Kobayashi, T., Sasaki, T. & Hane, K., 2019, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Node supported varifocal mirror
Sasaki, T., Kamada, T. & Hane, K., 2019, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2018
Evaluation of Scanning Micromirror with Acoustic Cavity
Sasaki, T., Kanesawa, T. & Hane, K., 2018, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Nonlinear spring tuning by electrostatic combs in micro mirror scanner
Hane, K., Izawa, T. & Sasaki, T., 2018, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Smart Glass Type Retinal Imaging System Using MEMS Scanner
Kaushik, N., Sasaki, T., Takahashi, Y., Nakazawa, T. & Hane, K., 2018, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2017
Confocal laser displacement sensor using MEMS varifocal mirror
Nakazawa, K., Sasaki, T., Furnia, H., Kamiya, J., Sasaki, H., Kamiya, T. & Hane, K., 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor
Nakazawa, K., Sasaki, T., Furuta, H., Kamiya, J., Sasaki, H., Kamiya, T. & Hane, K., 2017, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
GaN microring waveguide bonded to Si substrate by polymer
Hashida, R., Sasaki, T. & Hane, K., 2017, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
MEMS-based retinal-imaging system for visual health monitoring
Kaushik, N., Sasaki, T., Takahashi, Y., Nakazawa, T. & Hane, K., 2017, Proceedings of the International Display Workshops.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs
Izawa, T., Sasaki, T. & Hane, K., 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2016
Eyeglasses-type retinal imaging system using MEMS scanner
Sasaki, T., Nakazawa, T. & Hane, K., 2016, 16th International Conference on Nanotechnology - IEEE NANO 2016.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Hybrid Si/GaN microring resonator integrated with Si electrodes for electro-optic tuning
Thubthimthong, B., Sasaki, T. & Hane, K., 2016, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Silicon photonic waveguide devices tunable by in-plane actuation
Hane, K., Chu, H. M. & Sasaki, T., 2016, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding
Sasaki, T., Suzuki, T., Matsuura, H. & Hane, K., 2016, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Varifocal mirror integrated with scanner using wafer bonding technology
Nakazawa, K., Sasaki, T., Furuta, H., Kamiya, J., Sasaki, H., Kamiya, T. & Hane, K., 2016, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2015
Characterizations of the hybrid Si/GaN microring resonator with asymmetric vertical coupling
Thubthimthong, B., Sasaki, T. & Hane, K., 2015, Optics InfoBase Conference Papers.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Fabrication and evaluation of tunable submicron-thick monocrystalline silicon grating for integration on LSI circuit
Sasaki, T., Chernroj, S., Matsuura, H. & Hane, K., 2015, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
GaN freestanding waveguides on Si substrate for Si/GaN hybrid photonic integration
Sekiya, T., Sasaki, T. & Hane, K., 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Large-amplitude resonant varifocal mirror with an acoustic cavity
Sasaki, T., Rayas, L., Nakazawa, K. & Hane, K., 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Piezoresistive displacement sensor integrated in resonant varifocal mirror
Nakazawa, K., Sasaki, T., Furuta, H., Kamiya, J., Kamiya, T. & Hane, K., 2015, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2014
50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process
Wu, T., Sasaki, T., Akiyama, M. & Hane, K., 2014, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Dynamic response of silicon photonic variable-gap waveguide coupler switch
Abe, S., Chu, M. H., Sasaki, T. & Hane, K., 2014, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Photonic-crystal-waveguide-assisted directional couplers for hybrid Si/GaN nanophotonics
Thubthimthong, B., Sasaki, T. & Hane, K., 2014, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
λ/8 Precision parabolic resonant varifocal mirror
Nakazawa, K., Sasaki, T. & Hane, K., 2014, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2013
15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror
Wu, T., Sasaki, T., Akiyama, M. & Hane, K., 2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
A confocal laser scanning endoscope using a varifocal scanning mirror
Sasaki, T. & Hane, K., 2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
A continuous single-crystal-silicon membrane deformable mirror using bimorph spring
Wu, T., Sasaki, T., Akiyama, M. & Hane, K., 2013, Proceedings of SPIE - The International Society for Optical Engineering.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Displacement-amplified dynamic varifocal mirror using mechanical resonance
Sasaki, T., Sato, D. & Hane, K., 2013, International Conference on Optical MEMS and Nanophotonics.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes
Nagai, S., Sasaki, T., Kawaguchi, H., Iwabuchi, A. & Hane, K., 2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2011
Comb-drive III-nitride micro mirror fabricated by fast atom beam etching
Wang, Y. J., Sasaki, T., Wu, T., Hu, F. R. & Hane, K., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror
Chu, H. M., Sasaki, T. & Hane, K., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining
Li, P., Sasaki, T., Pan, L. F. & Hane, K., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Micro-mirrors connected in series for loss-mechanism study and low-voltage operation
Kotani, S., Chu, H. M., Sasaki, T. & Hane, K., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer
Sasaki, T. & Hane, K., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2008
Optical scanner with deformable mirror fabricated from SOI wafer
Sasaki, T. & Hane, K., 2008, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel
-
2007
Optically flat micromirror designs using stretched membrane with crystallization-induced stress
Sasaki, M., Sasaki, T., Hane, K. & Miura, H., 2007, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS.Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel