Dr. Dmytro Solonenko

Suchergebnisse

• 2023

  Atomic Layer Deposition of Titanium Nitride in Horizontal Vias Using Hydrazine as Nitrogen Precursor

  Fammels, J., Pilz, J. & Solonenko, D., 14 Dez. 2023.

  Publikation: Konferenzbeitrag › Poster

• Spectroscopic ellipsometry of anisotropic AlScN pseudobinary alloys

  Solonenko, D., 18 Sep. 2023.

  Publikation: Konferenzbeitrag › Poster

  • ellipsometry 100%
  • nitrides 47%
  • wurtzite 33%
  • textures 28%
  • electronics 26%
• 2022

  Strong correlation of the piezoelectric response and microstructure in AlYN solid solutions

  Solonenko, D., Strube, J., Fammels, J., Röbisch, V., Howell, K., Zhao, X., Pilz, J., Risquez, S., Moridi, M. & Bruckner, G., 19 Sep. 2022.

  Publikation: Konferenzbeitrag › Poster

  • solid solutions 100%
  • microstructure 71%
  • sputtering 47%
  • wurtzite 45%
  • yttrium 32%

• Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims: Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims

  Azeem, S. M., Spettel, J., Nikolai, A., Streque, J., Cassese, T., Pilz, J., Solonenko, D., Fleury, C., Dubois, F., Zhai, Y., Cselyuszka, N., Tortschanoff, A., Moridi, M. & Dao, T. D., 2022.

  Publikation: Konferenzbeitrag › Poster › Begutachtung

  • silicon oxides 100%
  • ellipsometry 92%
  • silicon nitrides 92%
  • nitrides 88%
  • vapor deposition 72%